NDLI: Radio frequency bias power effects on silicon nitride film deposited in SiH$_{4}$-NH$_{3}$ using a plasma-enhanced chemical vapor deposition

Content Provider	Springer Nature Link
Author	Kim, Suyean Kim, Byungwhan
Copyright Year	2009
Abstract	Silicon nitride films were deposited at room temperature in a plasma-enhanced chemical vapor deposition system. Ion energy and ion energy flux were measured with an ion energy analysis system. The effects of the radio frequency bias power on the ion energy distribution, deposition rate, refractive index, and surface roughness were examined along with the correlations between the ion energy diagnostics and film properties. The bias power varied from 30 W to 90 W. The surface roughness measured by atomic force microscopy was detailed in terms of the mean surface roughness and major pixel density. The deposition rate increased from 271 Å/min to 308 Å/min, increasing the bias power and correlation with the ion energy. Particularly, the refractive index increased with a decrease in the bias power. This is a unique feature resulting from the room-temperature deposition of silicon nitride film controlled in terms of the bias power. Moreover, the large variation from 1.94 to 2.49 facilitates the control of the refractive index as a function of the bias power. Strong dependency of the refractive index on the ion energy flux was also identified.
Starting Page	881
Ending Page	885
Page Count	5
File Format	PDF
ISSN	15989623
Journal	Metals and Materials
Volume Number	15
Issue Number	5
e-ISSN	20054149
Language	English
Publisher	The Korean Institute of Metals and Materials
Publisher Date	2009-10-26
Publisher Place	Springer
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	silicon nitride plasma-enhanced chemical vapor deposition room temperature SiH$_{4}$-NH$_{3}$ ion energy diagnostics deposition rate refractive index surface roughness Continuum Mechanics and Mechanics of Materials Characterization and Evaluation of Materials Engineering Thermodynamics, Heat and Mass Transfer Magnetism, Magnetic Materials Operating Procedures, Materials Treatment Metallic Materials
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Mechanics of Materials Metals and Alloys Condensed Matter Physics

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