NDLI: Modeling of mechanical behavior of microcantilever due to intrinsic strain during deposition

Content Provider	Springer Nature Link
Author	Kim, Sang Hyun Mani, Sathyanarayanan Boyd, James G.
Copyright Year	2006
Abstract	A model of mechanical behavior of microcantilever due to intrinsic strain during deposition of MEMS structures is derived. A linear ordinary differential equation is derived for the beam deflection as a function of the thickness of the deposited layer. Closed-form solutions are not possible, but numerical solutions are plotted for various dimensionless ratios of the beam stiffness, the intrinsic strain, and the elastic moduli of the substrate and deposited layer. This model predicts the deflection of the cantilever as a function of the deposited layer thickness and the residual stress distribution during deposition. The usefulness of these equations is that they are indicative of the real time behavior of the structures, i.e. it predicts the deflection of the beam continuously during deposition process.
Starting Page	1646
Ending Page	1652
Page Count	7
File Format	PDF
ISSN	1738494X
Journal	Journal of Mechanical Science and Technology
Volume Number	20
Issue Number	10
e-ISSN	19763824
Language	English
Publisher	Korean Society of Mechanical Engineers
Publisher Date	2006-01-01
Publisher Place	Seoul
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Multilayer Microcantilever Residual Stress Deposition Intrinsic Strain Beam Deflection Mechanical Engineering Vibration, Dynamical Systems, Control Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Mechanics of Materials Mechanical Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Analytical and experimental study of mismatch strain-induced microcantilever behavior during deposition

Intrinsic stress, mismatch strain, and self-assembly during deposition of thin films subjected to an externally applied force

Effect of residual stress on femoral arterial stress-strain behavior

Residual strain measurement of piezoelectric multilayers by spiral structure

Multiaxial stress-strain modeling and effect of additional hardening due to nonproportional loading

Effects of initial condition of steel plate on welding deformation and residual stress due to welding

Large deflection of viscoelastic beams using fractional derivative model

Averaging effects of a strain gage

Deformation Behaviour of Ti-8Ta-3Nb During Hot Forging

Modeling of mechanical behavior of microcantilever due to intrinsic strain during deposition

Similar Documents

Analytical and experimental study of mismatch strain-induced microcantilever behavior during deposition

Intrinsic stress, mismatch strain, and self-assembly during deposition of thin films subjected to an externally applied force

Effect of residual stress on femoral arterial stress-strain behavior

Residual strain measurement of piezoelectric multilayers by spiral structure

Multiaxial stress-strain modeling and effect of additional hardening due to nonproportional loading

Effects of initial condition of steel plate on welding deformation and residual stress due to welding

Large deflection of viscoelastic beams using fractional derivative model

Averaging effects of a strain gage

Deformation Behaviour of Ti-8Ta-3Nb During Hot Forging

Modeling of mechanical behavior of microcantilever due to intrinsic strain during deposition