NDLI: Influence of mechanical coupling by SiO$_{2}$ membrane on the frequency selectivity of microfabricated beam arrays for artificial basilar membranes

Content Provider	Springer Nature Link
Author	Song, Won Joon Jang, Jongmoon Kim, Sangwon Choi, Hongsoo
Copyright Year	2015
Abstract	Two types of microfabricated acoustic transducers—the resonator array of isolated beams (RAIB) and the resonator array of coupled beams (RACB)—were built using MEMS technology. The frequency selectivity of the two types of transducers was qualitatively compared using the transfer functions measured with a scanning laser Doppler vibrometer (SLDV). Each RAIB beam operated as a band-pass filter in the proximity to the corresponding resonance frequency, thereby showing the frequency-selective feature of the basilar membrane (BM). However, the frequency selectivity of RACB was poor because the SiO$_{2}$ membrane, which mechanically coupled the neighboring beams, suppressed the independent response of each beam. The influence of the mechanical coupling of the SiO$_{2}$ membrane was simulated using lumped parametric models. Simulation results showed that the coupling stiffness of the SiO$_{2}$ membrane may significantly undermine the frequency selectivity of the resonator array. The comparison of the frequency-selective performance revealed that RAIB is a better option than RACB for mimicking the tonotopy of BM.
Starting Page	963
Ending Page	971
Page Count	9
File Format	PDF
ISSN	1738494X
Journal	Journal of Mechanical Science and Technology
Volume Number	29
Issue Number	3
e-ISSN	19763824
Language	English
Publisher	Korean Society of Mechanical Engineers
Publisher Date	2015-03-15
Publisher Place	Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Artificial basilar membrane MEMS Resonator array Tonotopy Mechanical Engineering Vibration, Dynamical Systems, Control Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Mechanics of Materials Mechanical Engineering

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