NDLI: Development of digital lithography masking method with focusing mechanism for fabrication of micro-feature on biomachining process

Content Provider	Springer Nature Link
Author	Saragih, Agung Shamsuddin Ko, Tae Jo
Copyright Year	2013
Abstract	An alternative method is developed to remove metal from a work piece by combining a digital lithography system with biomachining. The purpose of this system is to obtain extra advantages as compared to conventional micro-fabrication processes currently used in practice. The use of microorganisms as a cutting tool in biomachining can eliminate the use of hazardous chemical materials, and the target surface is not affected by heat as a result of machining. The proposed process has a low material removal rate, but with less energy consumption. The greatest advantage is that the tools used in biomachining can be cultured continuously; i.e., they are renewable. Theoretically, the resolution of biomachining can reach 1 um due to the size of the bacteria. To achieve selective material removal, we combine the biomachining process with a polymer mask generated by a digital lithography (DL) system. In order to minimize errors and noise, the DL system was constructed by choosing robust and commonly available devices for most of the sub-tasks. This construction then can bring projected image onto work piece surface on fully controlled.
Starting Page	3017
Ending Page	3022
Page Count	6
File Format	PDF
ISSN	1738494X
Journal	Journal of Mechanical Science and Technology
Volume Number	27
Issue Number	10
e-ISSN	19763824
Language	English
Publisher	Springer Netherlands
Publisher Date	2013-10-18
Publisher Place	Dordrecht
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Alternative micro-fabrication Maskless lithography Biomachining process Mechanical Engineering Vibration, Dynamical Systems, Control Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Mechanics of Materials Mechanical Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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