NDLI: Positional accuracy of micropatterns in the roll-to-roll imprinting process using a wrapped roll mold

Content Provider	Springer Nature Link
Author	Hwang, Eun Soo Kwon, Sin Kim, Dongmin Cho, Young Tae Jung, Yoon Gyo
Copyright Year	2015
Abstract	Various micropatterns in flexible devices can be fabricated using the roll-to-roll (R2R) imprinting process, wherein a raw flexible plastic film is released from a roller and subjected to several patterning processes such as imprint lithography. In case a thin-film-transistor liquid-crystal display (TFT-LCD) is formed on the flexible film, overlay accuracy becomes the most important factor in the patterning process. To achieve positional accuracy, the process parameters that affect dimensional changes should be analyzed. In our system, the roll mold was fabricated by wrapping a thin film sheet to the roller. During the process, the substrate was deformed by web tension and bent by overall system architecture. Thus, web tension, misalignment angle, mold thickness, and substrate bending effects were regarded as the main parameters, which were analyzed and modeled into mathematical formulas. Positional errors and their tolerances were estimated using the formulas, and process parameters were designed to compensate for each error. Finally, the color filters in the flexible TFT-LCD display were manufactured using R2R imprinting and ink-jet printing. Dimensional error can be minimized to approximately ±15 μm for the entire area of 200 mm × 150 mm.
Starting Page	1697
Ending Page	1702
Page Count	6
File Format	PDF
ISSN	1738494X
Journal	Journal of Mechanical Science and Technology
Volume Number	29
Issue Number	4
e-ISSN	19763824
Language	English
Publisher	Korean Society of Mechanical Engineers
Publisher Date	2015-04-14
Publisher Place	Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Roll-to-roll process Imprint lithography Flexible display Positional accuracy of micropattern Web control Wrapped roll mold Mechanical Engineering Vibration, Dynamical Systems, Control Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Mechanics of Materials Mechanical Engineering

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