NDLI: A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system

Content Provider	Springer Nature Link
Author	Jung, Hyun Soo Hong, Min Sung Lee, Soo Hun Park, June Ho Kang, Dongwoo Lee, Moon G.
Copyright Year	2007
Abstract	There are increasing needs to inspect micro-pattern of flat panel display (FPD) device such as PDP and LCD. The inspection system should be able to measure over large size mother glass with high productivity and accuracy. Stylus profilers are adopted as an inspection system. To scan over large and heavy FPD device specimen, a “tip-scanning” head for stylus profiler is required. A simple method to realize a tip-scanning system is to miniaturize the whole scanning unit. In this study, a novel stylus profiler is proposed as a tip-scanning stylus profiler. The novel stylus profiler has leaf spring instead of conventional lever and pivot. To measure position of stylus an optical senor is used. Linear variable differential transformer is applied to feed-back scanning stage displacement. The stage is actuated by a voice coil motor (VCM). Target performances of the stylus profiler head are in the stroke over 20 μm with high accuracy. Specifications of xy-scanning stage are over 250 μm×250 μm and high bandwidth over 20 Hz. The magnetic and elastic characteristics of the mechanism are designed based on finite element (FE) analysis. After fabrication of the head and stage, they are integrated. Current amplifier and feedback controller are also developed. The performance of the stylus profiler is also validated by inspecting standard sample.
Starting Page	1491
Ending Page	1497
Page Count	7
File Format	PDF
ISSN	1738494X
Journal	Journal of Mechanical Science and Technology
Volume Number	21
Issue Number	10
Language	English
Publisher	Korean Society of Mechanical Engineers
Publisher Date	2007-01-01
Publisher Place	Seoul
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Stylus profiler Tip scanning Scanning stage Leaf spring Mechanical Engineering Vibration, Dynamical Systems, Control Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Mechanics of Materials Mechanical Engineering

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