NDLI: Effect of RF power and gas flow ratio on the growth and morphology of the PECVD SiC thin film s for MEMS applications

Content Provider	Springer Nature Link
Author	PERI, BHAVANA BORAH, BIKASH DASH, RAJ KISHORA
Copyright Year	2015
Abstract	Low temperature PECVD (Plasma Enhanced Chemical Vapour Deposition) deposited SiC thin films are promising materials for development of high temperature working MEMS (Microelectromechanical System) due to their excellent mechanical properties, non-corrosive nature and ability to withstand high temperature. However, the surface roughness of such thin films is the main obstacle to achieve thicker thin films for MEMS applications as the surface more rougher by increasing the thickness of PECVD SiC thin films. Therefore, in this present study, thicker SiC thin films were deposited by PECVD process by using the CH$_{4}$ and SiH$_{4}$ as the precursor gases in presence of Ar as the carrier gas and two process parameters i.e. RF (Radio Frequency) power with mixed frequency condition and flow ratio of silane to methane were varied by keeping the temperature and pressure constant to investigate the influence of these parameters on the growth rate, surface roughness and morphology of SiC thin films. It was observed that both the RF power (with the mixed frequency condition) and flow ratio of SiH$_{4}$/CH$_{4}$ can control the growth rate, surface roughness and morphology of the PECVD SiC thin films. Higher the carbon content in the thin films the surface became more smoother whereas the surface became for rougher by increasing the RF power.
Starting Page	1105
Ending Page	1112
Page Count	8
File Format	PDF
ISSN	02504707
Journal	Bulletin of Materials Science
Volume Number	38
Issue Number	4
e-ISSN	09737669
Language	English
Publisher	Indian Academy of Sciences
Publisher Date	2015-06-17
Publisher Institution	Indian Academy of Sciences
Publisher Place	Bangalore, India
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	PECVD SiC thin films morphology MEMS Materials Science Engineering
Content Type	Text
Resource Type	Article
Subject	Mechanics of Materials Materials Science

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