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  1. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
  2. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8
  3. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8, Issue 3, May 2014
  4. Different coloration of the nanostructured silicon surface upon plasma-assisted etching
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Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 11
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 10
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 9
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8, Issue 6, November 2014
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8, Issue 5, September 2014
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8, Issue 4, July 2014
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8, Issue 3, May 2014
Study of the structure of carbon matrices for radionuclide encapsulation by small-angle neutron scattering
On the possibility of increasing the superconducting gaps in heterogeneous superconductors
On the radiation of a planar undulator with constant magnetic field on its axis taken into account
Observation of small-angle contrast in refraction introscopy via full angular scanning
Temperature dependence of the circular polarization of electroluminescence from spin-polarized light-emitting diodes based on InGaAs/GaAs heterostructures
Nuclear-physical analysis of the contamination on the surface of a COMPLAST panel after 12-year exposure at the ISS
Nonlinear continual growth model of nonuniformly scaled reliefs as applied to the rigorous analysis of the X-ray scattering intensity of multilayer mirrors and gratings
Nanometer-precision contour-measurement technique for the diagnostics of multilayer nanostructures
Grazing diffraction of X-ray radiation in a planar single-crystal waveguide
Studying the physical properties of entangled electron spin states in a solid body
Determination of the sheet resistance of semiconductor films via near-field microwave microscopy
Hybrid polymer nanosystems based on selenium and zinc-selenide nanoparticles: Morphology, electronic structure, and thermodynamic properties
Simulation of radiation energy losses by channeled relativistic electrons in a crystal
Effect of long-range stresses on the structure of semiconductor heterosystems
Amorphization of ice near the melting point
Ion-beam erosion of carbon fibers of the composites
Formation of relief on a metallic target surface under the action of compression-plasma flows
Computer simulation of the two-stage ion polishing of a silicon surface
Ion-beam studies of synthetic single-crystal diamonds
Ion scattering (Me$^{+}$ → Me) by monatomic films
Photoluminescence of implantation-induced defects in SiO$_{2}$:Pb$^{+}$ glasses
Simulation of multiple scattering in argon ion collisions with an aluminum target at grazing angles of 5°–10°
Electron energy spectrum and peculiarities of optical absorption in single-layer 2D structures based on silicon dioxide with surface functional groups
Mössbauer studies of magnetite nanoparticles
Investigation of the processes of iron-ion recharging on surfaces of natural nanoclays (Based on Mössbauer spectroscopy data)
Change in the sign of the Kerr effect in ion-beam-synthesized Fe$_{3}$Si films
Effect of the cathode spots of a vacuum arc on the properties of the surface layer of structural materials
Interaction between plasma and the channel surface in a multichannel hollow cathode
Simulation of blistering for estimating the optical properties of disordered porous media
Different coloration of the nanostructured silicon surface upon plasma-assisted etching
Features of the plasma sputtering of polycrystalline Pb$_{1 − x }$Sn$_{ x }$S films
Droplet-phase reduction during the pulsed laser deposition of coatings onto the inner surface of tubes
Influence of growth conditions on the surface quality and structural perfection of multicomponent heterostructures based on group A$^{3}$B$^{5}$ compounds
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8, Issue 2, March 2014
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8, Issue 1, January 2014
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 6
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 5
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 4
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 3
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 2
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 1

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Different coloration of the nanostructured silicon surface upon plasma-assisted etching

Content Provider Springer Nature Link
Author Zalutskaya, A. A. Prokaznikov, A. V.
Copyright Year 2014
Abstract The effects of changes in the color of silicon plates with nanostructured surfaces versus the features of nanostructures are investigated. Vertical nanostructures with high aspect ratios are constructed via anisotropic two-stage plasma-assisted etching (Bosch process). The surface coloration is explained by the fact that incident radiation is partly trapped by waveguide edge modes and its remaining part is scattered at the surface. The surface-film color is related to the positive and negative curvature of the nanostructures formed as a result of the plasma-assisted process.
Starting Page 595
Ending Page 601
Page Count 7
File Format PDF
ISSN 10274510
Journal Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
Volume Number 8
Issue Number 3
e-ISSN 18197094
Language English
Publisher Pleiades Publishing
Publisher Date 2014-06-06
Publisher Place Moscow
Access Restriction One Nation One Subscription (ONOS)
Subject Keyword Surfaces and Interfaces, Thin Films
Content Type Text
Resource Type Article
Subject Nanoscience and Nanotechnology Surfaces, Coatings and Films
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