NDLI: Determination of the thickness of a gold layer deposited onto silicon via reflected electron spectroscopy

Content Provider	Springer Nature Link
Author	Afanas’ev, V. P. Kaplya, P. S. Kostavskiy, I. A.
Copyright Year	2013
Abstract	The energy spectra of electrons reflected from a gold layer deposited onto a silicon substrate have been measured when the energy losses are comparable with the energy of a probe electron beam (5 keV) and the elastic energy losses correspond to an electron-beam energy of 14 keV. A subsequent theory for calculating the energy spectra of electrons and light ions reflected from a multilayer target, which is used to interpret the energy spectra measured in the wide range of energy losses, has been developed. It is found that the elastic scattering processes in the gold layer (the thickness of which is tens of monolayers) substantially affect formation of the energy spectra. The Au layer thicknesses calculated by means of the developed theory are compared with those determined from the spectra of elastically reflected electrons. The errors of the Au layer thickness measurements via the proposed method are discussed.
Starting Page	123
Ending Page	129
Page Count	7
File Format	PDF
ISSN	10274510
Journal	Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
Volume Number	7
Issue Number	1
e-ISSN	18197094
Language	English
Publisher	SP MAIK Nauka/Interperiodica
Publisher Date	2013-02-23
Publisher Place	Dordrecht
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Surfaces and Interfaces, Thin Films
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Surfaces, Coatings and Films

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