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  1. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
  2. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7
  3. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7, Issue 5, September 2013
  4. Applying low-energy ion implantation in the creation of nanocontacts on the surface of ultrathin semiconductor films
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Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 11
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 10
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 9
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 8
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7, Issue 6, November 2013
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7, Issue 5, September 2013
Effect of the structural organization of polyamic-acid salt solutions on the morphology of Langmuir Monolayers of the prepolymer
Domain structure of triglycine sulfate family crystals according to the data of piezoresponse force microscopy and their macroscopic dielectric properties
Periodic domain structures in stoichiometric lithium niobate: Formation by electron beam
SEM diagnostics of the surface of MK-40 and MA-40 heterogeneous ion-exchange membranes in the swollen state after thermal treatment
Formation of microcrystalline structures in a flow of supersaturated HIO$_{3}$ solution through the pores of track membranes
Temperature dependence of the cathodoluminescence spectra of irradiated light-emitting-diode structures with multiple InGaN/GaN quantum wells
Exciton polaritons in a one-and-a-half-wave algan microcavity: Results of mathematical modeling
Simulation of the current induced by $^{63}$Ni beta radiation
Investigation of stacking faults in 4H-SiC using the electron-beam-induced current method
Rate of generation of nonequilibrium charge carriers by a focused X-ray beam
Electron structure investigations of homogeneous hydrocarbon films formed in plasma conditions of T-10 tokamak
Individual field emitters based on rodlike ZnO crystals
Morphology, composition and thermal stability of thin SiO$_{2}$/HfO$_{2}$ layers grown on silicon by electron-beam evaporation in vacuum
Electron microscopic investigations of the layer, Island, and dendrite polymorphic crystallizations of amorphous films
Synthesis and structure of Mg(Fe$_{0.8}$Ga$_{0.2}$)$_{2}$O$_{4−δ}$ film materials
Modification of the physical-mechanical properties of Co-Ni electrodeposited coatings by X-Ray irradiation
Nanoscale peculiarities of the thermally stimulated surface autosegregation of covalent crystals: Gallium arsenide
SEM study of the influence of microstructure wettability on the character of the oil saturation of the porous space of rocks
Device for the precise shape correction of optical surfaces by ion-beam and reactive plasma etching
Debye-Scherrer diffraction in the backscattering geometry at the Kurchatov Synchrotron Radiation source. Part 1. Characterization of the method
Technological aspects in the design of a planar X-ray waveguide resonator
Narrowband spectral filters on the basis of threadlike metal Si photonic crystals
Fractal-like structures formed in the interelectrode gap during grid ion-source electrode sputtering
Adhesion properties of a silicon-containing calcium phosphate coating deposited by RF magnetron sputtering on a heated substrate
Influence of the high-power ion-beam irradiation of a hydroxyapatite target on the properties of formed calcium phosphate coatings
Peculiarities of pluronic crystallization in thin films
Applying low-energy ion implantation in the creation of nanocontacts on the surface of ultrathin semiconductor films
Neutron diffraction study of a single crystal of lutetium-aluminum garnet activated with chromium, Lu$_{3}$Al$_{5}$O$_{12}$:Cr$^{3+}$
Numerical experiments on low-energy ion scattering at a surface containing adsorbed impurity atoms
X-ray photoelectron study of the oxidative modification of proteins
Evolution of the phase composition and defect substructure of rail steel subjected to high-intensity electron-beam treatment
Kinetic-energy release distributions and stability of niobium-carbon clusters sputtered from the surface of niobium carbide by xenon ions
Features of the structure of TiN films after irradiation with nitrogen
Change in the relief of a target surface treated by compression plasma flows
Computer simulation of the photoluminescence of nanostructured aluminum oxide excited with pulsed synchrotron radiation
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7, Issue 4, July 2013
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7, Issue 3, May 2013
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7, Issue 2, March 2013
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 7, Issue 1, January 2013
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 6
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 5
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 4
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 3
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 2
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques : Volume 1

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Applying low-energy ion implantation in the creation of nanocontacts on the surface of ultrathin semiconductor films

Content Provider Springer Nature Link
Author Muradkabilov, D. M. Tashmukhamedova, D. A. Umirzakov, B. E.
Copyright Year 2013
Abstract A new way for obtaining nanocontacts on the surface of semiconductors using Si (111) thin films as an example is proposed. The essence of the method lies in the fact that, first, cobalt-silicide nanofilms with a thickness of 45–50 Å are formed by ion implantation in combination with annealing; then, atoms of the contact metal (Al) are sputtered. The specific resistance of the CoSi$_{2}$ nanofilms is (2–3) × 10$^{−5}$ Ω × cm.
Starting Page 967
Ending Page 971
Page Count 5
File Format PDF
ISSN 10274510
Journal Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
Volume Number 7
Issue Number 5
e-ISSN 18197094
Language English
Publisher Springer US
Publisher Date 2013-10-12
Publisher Place Boston
Access Restriction One Nation One Subscription (ONOS)
Subject Keyword Surfaces and Interfaces, Thin Films
Content Type Text
Resource Type Article
Subject Nanoscience and Nanotechnology Surfaces, Coatings and Films
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