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| Content Provider | Springer Nature Link |
|---|---|
| Author | Hocheng, H. Kao, P. S. Chen, Y. F. |
| Copyright Year | 2001 |
| Abstract | 316L stainless steel is deemed an indispensable material in the semiconductor industry. In many instances, the surface of the production equipment needs to be treated for low-corrosion passivation, good finish, weldability, and cleanliness. The process characteristics of electropolishing meet these requirements well. The current study investigates the effects of the major processing parameters on the anticorrosion performance and the surface roughness. The electrolyte with 10% water content and a ratio between H$_{2}$SO$_{4}$ and H$_{3}$PO$_{4}$ of 4 and 6 has been proven to be successful, showing no corrosion pitting points on the specimen surface. The electrolyte temperature of 85±10 °C and the electrical current density of 0.5 to 1.0 A/cm$^{2}$ are found to be optimal. The processing time beyond 3 to 5 min produces no further improvement. The addition of 10% glycerin provides a very fine surface (maximum roughness of 0.05 µm), while the anticorrosion performance is deteriorated. The results obtained are useful for the manufacture of the semiconductor equipment. |
| Starting Page | 414 |
| Ending Page | 418 |
| Page Count | 5 |
| File Format | |
| ISSN | 10599495 |
| Journal | Journal of Materials Engineering and Performance |
| Volume Number | 10 |
| Issue Number | 4 |
| e-ISSN | 15441024 |
| Language | English |
| Publisher | Springer-Verlag |
| Publisher Date | 2001-01-01 |
| Publisher Place | New York |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | electromachining passivation pitting corrosion type 316L stainless steel Characterization and Evaluation of Materials Materials Science Tribology, Corrosion and Coatings Quality Control, Reliability, Safety and Risk Engineering Design |
| Content Type | Text |
| Resource Type | Article |
| Subject | Mechanics of Materials Materials Science Mechanical Engineering |
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