NDLI: Residual Stress and Surface Energy of Sputtered TiN Films

Content Provider	Springer Nature Link
Author	Pang, Xiaolu Zhang, Liqiang Yang, Huisheng Gao, Kewei Volinsky, Alex A.
Copyright Year	2015
Abstract	Morphology, structure, residual stress, and surface energy of magnetron-sputtered titanium nitride (TiN) thin films, deposited at 300 °C with a thickness in the 0.5-1.7 μm range, were characterized. Film microstructure, the origin of residual stress, and its effect on the surface energy were analyzed. The grain size increased with the film thickness. X-ray diffraction showed (200) to (111) preferred orientation transitions with the increasing film thickness. The stress in the TiN films changed from compressive −0.3 GPa to tensile with the film thickness reaching 0.3 GPa. Larger grain size, initial porosity, and sub-grains generation are the reasons for significant changes in the residual stress. Surface energy was investigated by contact angle of water and glycerol droplets, which both show a significant change with the different stress state and crystal preferred orientation. The TiN films form a contact angle larger than 100° with water as a test liquid, demonstrating their hydrophobicity. While the residual stress changes from compressive to tensile, the contact angle reaches 118°, and the corresponding surface energy changes from 38.8 to 24.2 mJ/m$^{2}$. One can expect to achieve a certain desired surface state of TiN films for potential applications.
Starting Page	1185
Ending Page	1191
Page Count	7
File Format	PDF
ISSN	10599495
Journal	Journal of Materials Engineering and Performance
Volume Number	24
Issue Number	3
e-ISSN	15441024
Language	English
Publisher	Springer US
Publisher Date	2015-01-21
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	residual stress surface energy TiN films Characterization and Evaluation of Materials Tribology, Corrosion and Coatings Quality Control, Reliability, Safety and Risk Engineering Design
Content Type	Text
Resource Type	Article
Subject	Mechanics of Materials Materials Science Mechanical Engineering

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