NDLI: Sputter deposition of phosphors for electroluminescent flat panel displays

Content Provider	Springer Nature Link
Author	Davidson, Mark R. Pathangey, Balu Holloway, Paul H. Rack, Philip D. Sun, S. S. King, C. N.
Copyright Year	1997
Abstract	Thin film electroluminescent (TFEL) phosphors for flat panel displays have been produced by several different growth methods including atomic layer epitaxy, chemical vapor deposition, and sputter deposition. There is a great deal of interest in sputter deposition due to the extensive knowledge base and equipment from other existing thin film manufacturing. However, deposition of sulfide-based TFEL phosphors by conventional radio frequency magnetron sputtering has proven to be difficult due to the formation of negative sulfur ions near the target which are accelerated to the growing film by the self-bias developed on the target. This negative-ion resputtering can result in amorphization or re-sputtering of the phosphor films. In severe cases, a net sputtering of the substrate can result. In order to remedy this negative ion resputtering problem, modifications of the magnetron geometry and ion-beam sputtering have been evaluated for production of Ca$_{x}$Sr$_{1−x}$Ga$_{2}$S$_{4}$:Ce and SrS:Ce TFEL phosphors. Sputter deposited TFEL films also typically require a postdeposition anneal which adds to expense and can cause other problems for the flat panel display. Ion-beam assist during deposition of undoped ZnS was studied as a method to induce surface-atom mobility and a more crystalline as-deposited film for use in monochrome TFEL displays.
Starting Page	1355
Ending Page	1360
Page Count	6
File Format	PDF
ISSN	03615235
Journal	Journal of Electronic Materials
Volume Number	26
Issue Number	11
e-ISSN	1543186X
Language	English
Publisher	Springer-Verlag
Publisher Date	1997-01-01
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electroluminescent (EL) flat panel displays negative ion phosphors sputter deposition thin film Optical and Electronic Materials Characterization and Evaluation of Materials Electronics and Microelectronics, Instrumentation Solid State Physics and Spectroscopy
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Electronic, Optical and Magnetic Materials Condensed Matter Physics Electrical and Electronic Engineering

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