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| Content Provider | Springer Nature Link |
|---|---|
| Author | Pelenc, D. Merlin, J. Etcheberry, A. Ballet, P. Baudry, X. Brellier, D. Destefanis, V. Ferron, A. Fougères, P. Giotta, D. Grangier, C. Mollard, L. Perez, A. Rochette, F. Rubaldo, L. Vaux, C. Vigneron, J. Zanatta, J. P. |
| Copyright Year | 2014 |
| Abstract | This paper reports the first implementation in our laboratory of a chemical–mechanical polishing (CMP) process for CdZnTe (CZT) substrates prepared for growth of HgCdTe layers by liquid phase epitaxy and molecular beam epitaxy. The process enables significant reduction of the thickness of the damaged zone induced by the mechanical polishing that must be etched away before epitaxy. Resulting improvements in surface morphology, in terms of waviness and density of point defects, are reported. The chemical state of surfaces polished by CMP was characterized by x-ray photoelectron spectroscopy. The chemical state was highly homogeneous; comparison with a reference surface is reported. End use assessment of this surface processing was compared with that of reference substrates by preparation of focal-plane arrays in the medium-wavelength infrared spectral range, by using epitaxial layers grown on substrates polished by different methods. The electro-optical performance of the detectors, in terms of photovoltaic noise operability, are reported. The results reveal that the state of this CMP surface is at the level of the best commercial substrates. |
| Starting Page | 3004 |
| Ending Page | 3011 |
| Page Count | 8 |
| File Format | |
| ISSN | 03615235 |
| Journal | Journal of Electronic Materials |
| Volume Number | 43 |
| Issue Number | 8 |
| e-ISSN | 1543186X |
| Language | English |
| Publisher | Springer US |
| Publisher Date | 2014-05-10 |
| Publisher Place | Boston |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | CdHgTe chemical–mechanical polishing x-ray photoelectron spectroscopy focal-plane array Optical and Electronic Materials Characterization and Evaluation of Materials Electronics and Microelectronics, Instrumentation Solid State Physics |
| Content Type | Text |
| Resource Type | Article |
| Subject | Materials Chemistry Electronic, Optical and Magnetic Materials Condensed Matter Physics Electrical and Electronic Engineering |
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