NDLI: Comparative Study on MOCVD Growth of a-Plane GaN Films on r-Plane Sapphire Substrates Using GaN, AlGaN, and AlN Buffer Layers

Content Provider	Springer Nature Link
Author	Dai, J. N. Wu, Z. H. Yu, C. H. Zhang, Q. Sun, Y. Q. Xiong, Y. K. Han, X. Y. Tong, L. Z. He, Q. H. Ponce, F. A. Chen, C. Q.
Copyright Year	2009
Abstract	In this work, we have comparatively investigated the effects of the GaN, AlGaN, and AlN low-temperature buffer layers (BL) on the crystal quality of a-plane GaN thin films grown on r-plane sapphire substrates. Scanning electron microscopy images of the a-plane GaN epilayers show that using an AlGaN BL can significantly reduce the density of surface pits. The full-width at half-maximum values of the $$ (11\overline{2} 0) $$ x-ray rocking curve (XRC) are 0.19°, 0.36°, and 0.48° for the films grown using Al$_{0.15}$Ga$_{0.85}$N, GaN, and AlN BLs, respectively, indicating that an AlGaN BL can effectively reduce the mosaicity of the films. Room-temperature photoluminescence shows that the AlGaN BL results in lower impurity incorporation in the subsequent a-plane GaN films, as compared with the case of GaN and AlN BLs. The higher crystal quality of a-plane GaN films produced by the Al$_{0.15}$Ga$_{0.85}$N BL could be due to improvement of BL quality by reducing the lattice mismatch between the BL and r-sapphire substrates, while still keeping the lattice mismatch between the BL and epitaxial a-plane GaN films relatively small.
Starting Page	1938
Ending Page	1943
Page Count	6
File Format	PDF
ISSN	03615235
Journal	Journal of Electronic Materials
Volume Number	38
Issue Number	9
e-ISSN	1543186X
Language	English
Publisher	Springer US
Publisher Date	2009-06-11
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	a-Plane GaN metalorganic chemical vapor deposition (MOCVD) scanning electron microscope (SEM) x-ray diffraction (XRD) photoluminescence (PL) Raman Solid State Physics and Spectroscopy Electronics and Microelectronics, Instrumentation Characterization and Evaluation of Materials Optical and Electronic Materials
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Electronic, Optical and Magnetic Materials Condensed Matter Physics Electrical and Electronic Engineering

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