NDLI: YIG thin film for RF integrated inductor

Content Provider	Springer Nature Link
Author	Liu, Feng Ye, Shuangli
Copyright Year	2017
Abstract	The yttrium iron garnet (YIG) thin films prepared by the sol-gel method and rapid thermal annealing (RTA) process for integrated inductor are investigated. The X-ray diffraction (XRD) results indicate that the YIG film annealed above 650 °C is poly-crystalline with single-phase garnet structure. Moreover, it can be found that the initial permeability μ $_{i}$, saturation magnetization M $_{S}$ and coercivity H $_{c}$ of these YIG films increase with increasing RTA temperature. Low temperature annealing after crystallization can further improve the magnetic properties of YIG film. Thereby, a planar integrated inductor in the presence of Si substrate/SiO$_{2}$ layer/Y$_{2.8}$Bi$_{0.2}$Fe$_{5}$O$_{12}$ thin film/Cu spiral coil structure is fabricated successfully by the standard IC processes. Due to the magnetic enhancement originated from YIG film, the inductance L and quality factor Q of the inductor with YIG film are improved in a certain frequency range.
Starting Page	557
Ending Page	561
Page Count	5
File Format	PDF
ISSN	10002413
Journal	Journal of Wuhan University of Technology-Mater. Sci. Ed.
Volume Number	32
Issue Number	3
e-ISSN	19930437
Language	English
Publisher	Wuhan University of Technology
Publisher Date	2017-06-29
Publisher Place	Wuhan
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Y$_{2.8}$Bi$_{0.2}$Fe$_{5}$O$_{12}$ thin films sol-gel method rapid thermal annealing integrated inductor Materials Science
Content Type	Text
Resource Type	Article
Subject	Materials Science

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