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| Content Provider | Springer Nature Link |
|---|---|
| Author | Marin, D. V. Volodin, V. A. Gorokhov, E. B. Shcheglov, D. V. Latyshev, A. V. Vergnat, M. Koch, J. Chichkov, B. N. |
| Copyright Year | 2010 |
| Abstract | We have studied the formation and modification of germanium nanoclusters in GeO$_{x}$ films under the action of pulse laser and isochronous furnace annealing. Pulse treatments were effected using either a Tisapphire laser operating at a wavelength of λ = 800 nm and a pulse duration τ of about 30 fs or a KrF excimer laser with λ = 248 nm and τ = 25 ns. The pulse annealing stimulated both the crystallization of initial amorphous Ge nanoclusters in GeO$_{x}$ matrix and the formation of new nanoclusters. In order to prevent the evaporation of films under the action of laser radiation, the samples were covered with a protective layer of SiN$_{x}$O$_{y}$. The proposed approach can be used for the modification of dimensions and phase composition of Ge clusters in GeO$_{x}$ films. |
| Starting Page | 439 |
| Ending Page | 442 |
| Page Count | 4 |
| File Format | |
| ISSN | 10637850 |
| Journal | Technical Physics Letters |
| Volume Number | 36 |
| Issue Number | 5 |
| e-ISSN | 10906533 |
| Language | English |
| Publisher | SP MAIK Nauka/Interperiodica |
| Publisher Date | 2010-06-04 |
| Publisher Place | Dordrecht |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | Classical Continuum Physics |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy |
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