NDLI: The effect of high implant doses and high ion current densities on polyimide film properties

Content Provider	Springer Nature Link
Author	Popok, V. N. Azarko, I. I. Khaibullin, R. I.
Copyright Year	2002
Abstract	Ar$^{+}$ and Ar$^{2+}$ ions with energies of 40 and 80 keV are implanted into thin polyimide films. The implant doses and the ion current densities are varied in a wide range between 2.5×10$^{14}$ and 1.5×10$^{17}$ cm$^{−2}$ and between 1 and 16 µA/cm$^{2}$, respectively. The effect of the implantation parameters on the electrical, paramagnetic, and optical properties of the ion-modified near-surface polymer layer is studied. It is shown that the radiation-stimulated thermolysis of polyimide and its chemical constitution are responsible for a monotonic growth of the electrical conductivity of the layer with increasing ion current at a given implant dose. When the ion current density is fixed, the conductivity grows stepwise with implant dose, whereas the concentration of paramagnetic centers and the optical transmission of the modified layer decrease. The dependences observed are treated within a model of the structural reconfiguration of the polymer carbonized phase formed during the implantation.
Starting Page	459
Ending Page	464
Page Count	6
File Format	PDF
ISSN	10637842
Journal	Technical Physics
Volume Number	47
Issue Number	4
e-ISSN	10906525
Language	English
Publisher	Nauka/Interperiodica
Publisher Date	2002-01-01
Publisher Place	Moscow
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Mechanics, Fluids, Thermodynamics
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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Erratum: “The effect of high implant doses and high ion current densities on polyimide film properties” [Technical physics 47 (4), 459 (2002)]

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