NDLI: Fabrication of iridium oxide neural electrodes at the wafer level

Content Provider	Springer Nature Link
Author	Zhang, He Pei, WeiHua Zhao, ShanShan Yang, XiaoWei Liu, RuiCong Liu, YuanYuan Wu, Xian Guo, DongMei Gui, Qiang Guo, XuHong Xing, Xiao Wang, YiJun Chen, HongDa
Copyright Year	2016
Abstract	Electro-deposition, electrical activation, thermal oxidation, and reactive ion sputtering are the four primary methods to fabricate iridium oxide film. Among these methods, reactive ion sputtering is a commonly used method in standard micro-fabrication processes. In different sputtering conditions, the component, texture, and electrochemistry character of iridium oxide varies considerably. To fabricate the iridium oxide film compatible with the wafer-level processing of neural electrodes, the quality of iridium oxide film must be able to withstand the mechanical and chemical impact of post-processing, and simultaneously achieve good performance as a neural electrode. In this study, parameters of sputtering were researched and developed to achieve a balance between mechanical stability and good electrochemical characteristics of iridium oxide film on electrode. Iridium oxide fabricating process combined with fabrication flow of silicon electrodes, at wafer-level, is introduced to produce silicon based planar iridium oxide neural electrodes. Compared with bare gold electrodes, iridium oxide electrodes fabricated with this method exhibit particularly good electrochemical stability, low impedance of 386 kΩ at 1 kHz, high safe charge storage capacity of 3.2 mC/cm$^{2}$, and good impedance consistency of less than 25% fluctuation.
Starting Page	1399
Ending Page	1406
Page Count	8
File Format	PDF
ISSN	16747321
Journal	Science in China Series E: Technological Sciences
Volume Number	59
Issue Number	9
e-ISSN	18691900
Language	English
Publisher	Science China Press
Publisher Date	2016-09-04
Publisher Place	Beijing
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	reactive ion sputtering iridium oxide wafer-level neural electrode Engineering
Content Type	Text
Resource Type	Article
Subject	Engineering Materials Science

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