NDLI: MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature

Content Provider	Springer Nature Link
Author	Pant, B. Choi, S. Baumert, E. K. Allen, B. L. Graham, S. Gall, K. Pierron, O. N.
Copyright Year	2011
Abstract	Microelectromechanical system (MEMS) devices based on electro-thermal actuation have been used over the past few years to perform tensile tests on nanomaterials. However, previous MEMS designs only allowed small (e.g., <100 nm) total displacement range without a significant increase in temperature near the nanospecimens (<20°C), thereby limiting the design of the load sensor or the range of nanomaterials to test. Here we characterize the thermo-mechanical behavior of three MEMS devices, using optical displacement measurements, micro-Raman temperature measurements, and finite element modeling. We observe the increase in temperature near the nanospecimen gap per displacement of thermal actuator to linearly decrease with the distance between nanospecimen gap and thermal actuator. We also present a MEMS device that can provide up to 1.6 μm of total displacement with less than 10°C increase in temperature near the nanospecimens, more than one order of magnitude improvement with respect to previously published MEMS material testing setups. This MEMS device can be used for accurate, temperature-controlled tensile testing of nanocrystalline metallic nanobeams.
Starting Page	607
Ending Page	617
Page Count	11
File Format	PDF
ISSN	00144851
Journal	Experimental Mechanics
Volume Number	52
Issue Number	6
e-ISSN	17412765
Language	English
Publisher	Springer US
Publisher Date	2011-07-22
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	MEMS Nanomechanics Nanocrystalline metals Structural Mechanics Optics, Optoelectronics, Plasmonics and Optical Devices Characterization and Evaluation of Materials Mechanics Continuum Mechanics and Mechanics of Materials Vibration, Dynamical Systems, Control
Content Type	Text
Resource Type	Article
Subject	Mechanics of Materials Mechanical Engineering Aerospace Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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