NDLI: In-situ Vapor-Phase Lubrication of MEMS

Content Provider	Springer Nature Link
Author	Asay, David B. Dugger, Michael T. Kim, Seong H.
Copyright Year	2007
Abstract	In-situ vapor-phase lubrication of sidewall MicroElectroMechanical System (MEMS) devices is investigated with 1-pentanol vapor. The 1-pentanol vapor successfully maintains lubricating properties between silicon contacts of MEMS devices. This is attributed to the ability of alcohol to adsorb on the silicon surface and sustain a lubricating layer, which prevents wear of the MEMS surfaces and minimizes friction. In the presence of these vapors, MEMS devices with sliding contacts operated without failure for up to a factor of 1.7 × 10$^{4}$ longer than in dry N$_{2}$ gas alone, representing a dramatic improvement in operating life. Adhesion and friction were also investigated as a function of alcohol vapor pressure. The adhesive force between microfabricated MEMS sidewall surfaces increases from ∼30 to ∼60 nN as the alcohol vapor pressure is increased from 0 to 20% of saturation, and then only slightly increases to ∼75 nN at 95% of saturation vapor pressure. This increase in force is well within the capabilities of even the lowest force on-chip actuators, such as electrostatic comb drives which can typically generate a few μN of force. The static friction force was found to be independent of alcohol vapor pressure within the uncertainties in the measurement.
Starting Page	67
Ending Page	74
Page Count	8
File Format	PDF
ISSN	10238883
Journal	Tribology Letters
Volume Number	29
Issue Number	1
e-ISSN	15732711
Language	English
Publisher	Springer US
Publisher Date	2007-11-27
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	MEMS Lubrication Vapor phase Alcohol Nanotechnology Physical Chemistry Theoretical and Applied Mechanics Surfaces and Interfaces, Thin Films Tribology, Corrosion and Coatings
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Mechanics of Materials Mechanical Engineering Surfaces and Interfaces

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