NDLI: Effects of pH and Oxidizer on Chemical Mechanical Polishing of AISI 1045 Steel

Content Provider	Springer Nature Link
Author	Jiang, Liang He, Yongyong Luo, Jianbin
Copyright Year	2014
Abstract	AISI 1045 steel has been widely used as the substrate for thin film deposition. In some cases, an ultra-smooth surface of AISI 1045 steel is needed and is even indispensible for the satisfactory deposition of thin film. In this paper, chemical mechanical polishing technique was employed to prepare the ultra-smooth surface of AISI 1045 steel. The effects of pH and H$_{2}$O$_{2}$ on the polishing performance of AISI 1045 steel were investigated. It is revealed that, with the increase of pH, the material removal rate (MRR) and the static etching rate (SER) of AISI 1045 steel gradually decrease due to the formation of passive iron oxides on the top surface, and thus the surface quality gradually improves. At pH 4.00, with the addition of H$_{2}$O$_{2}$, the SER of AISI 1045 steel is further suppressed; while the MRR of AISI 1045 steel first dramatically increases due to the formation of porous iron oxides with relatively low mechanical strength on the surface when the H$_{2}$O$_{2}$ concentration increases from 0 to 0.01 wt%, and then decreases since the porous iron oxides gradually grow compact when the H$_{2}$O$_{2}$ concentration further increases. The increase of the compactness of the iron oxides might be attributed to the crystallization of γ-FeOOH into α-FeOOH and even into α-Fe$_{2}$O$_{3}$ and the resulting polymerization of the amorphous iron oxides.
Starting Page	327
Ending Page	335
Page Count	9
File Format	PDF
ISSN	10238883
Journal	Tribology Letters
Volume Number	56
Issue Number	2
e-ISSN	15732711
Language	English
Publisher	Springer US
Publisher Date	2014-09-30
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Chemical mechanical polishing AISI 1045 steel pH Hydrogen peroxide Tribology, Corrosion and Coatings Surfaces and Interfaces, Thin Films Theoretical and Applied Mechanics Physical Chemistry Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Mechanics of Materials Mechanical Engineering Surfaces and Interfaces

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