NDLI: Super Sensitive Mass Detection in Nonlinear Regime

Content Provider	Springer Nature Link
Author	Azizi, Saber Ahmadian, Iman Cetinkaya, Cetin Rezazadeh, Ghader
Copyright Year	2015
Abstract	Nonlinear dynamics of a clamped–clamped micro-beam exposed to a two sided electrostatic actuation is investigated to determine super sensitive regions for mass detection. The objective is to investigate the sensitivity of the frequency spectrum of various regions in the phase space to the added mass and force the system to operate in its super sensitive regions by applying an appropriate pulse to its control electrodes. The electrostatic actuation in the top electrode is a combination of a DC, AC and a pulse voltage, the excitation on the lower electrode is only a DC and a pulse voltage. The governing equation of the motion, derived using the Hamiltonian principle, is discretized to an equivalent single-degree of freedom system using the Galerkin method. Depending on the applied electrostatic voltage to the micro-beam, it is demonstrated that the number and types of equilibrium points of the system can be modified. In this study, the level of the DC electrostatic voltage is chosen such a way that the system has three equilibrium points including two centers and a saddle node where the homoclinic orbit originates. According to the reported results, the mass sensing sensitivity depends on the operating orbit; some orbits exhibit considerably higher mass detection sensitivity to the added mass compared to that of a typical quartz crystal micro balance instrument.
Starting Page	1
Ending Page	15
Page Count	15
File Format	PDF
ISSN	15572064
Journal	Sensing and Imaging: An International Journal
Volume Number	16
Issue Number	1
e-ISSN	15572072
Language	English
Publisher	Springer US
Publisher Date	2015-04-04
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	MEMS Nonlinear dynamics Mass sensing Frequency shift Electro static actuation Electrical Engineering Microwaves, RF and Optical Engineering Imaging Radiology
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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