NDLI: Verification of the algorithm for emission tomography of plasma inhomogeneities in a plasma-chemical reactor using the Langmuir multiprobe

Content Provider	Springer Nature Link
Author	Fadeev, A. V. Rudenko, K. V.
Copyright Year	2014
Abstract	The few-view emission tomography (ET) of plasma, which introduces physical properties of objects into a reconstruction algorithm, requires a reliable experimental verification using independent methods for validating an adopted model of plasma inhomogeneities. The chosen test object—low-temperature argon plasma in a reactor with a remote plasma source—allows one to study the two-dimensional spatial distribution of a concentration of Ar$^{+}$ ions, which is calculated using the two-view ET, and to verify results using direct measurements by a Langmuir multiprobe located in the plane of tomographic scanning. Studies are carried out for the chamber pressure 2–12 mTorr; the sensitivity of the ion-field homogeneity to the external magnetic field is estimated. A close agreement between concentration fields of Ar$^{+}$, which are measured and reconstructed by tomography, is obtained. The divergence between the probe method and the ET data reconstruction with respect to two views is not above 10%.
Starting Page	252
Ending Page	257
Page Count	6
File Format	PDF
ISSN	10637397
Journal	Russian Microelectronics
Volume Number	43
Issue Number	4
e-ISSN	16083415
Language	English
Publisher	Pleiades Publishing
Publisher Date	2014-07-15
Publisher Place	Moscow
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electrical Engineering
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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