NDLI: Optical Emission Spectroscopy of Abnormal Glow Region in Nitrogen Plasma

Content Provider	Springer Nature Link
Author	Qayyum, A. Zeb, Shaista Ali, Shujaat Waheed, A. Zakaullah, M.
Copyright Year	2005
Abstract	Optical emission spectroscopy of the active species in N$_{2}$ plasma is carried out to investigate their concentration as a function of discharge parameters such as filling pressure (2.0–7.0 mbar), source power (100–200 W) and gas flow rate (50–300 mg/min). The primary motivation of this work is to obtain reliable information about the concentration of the active species of N$_{2}$ plasma, which play an important role in plasma surface nitriding processes. Emission intensity from the selected electronic excited states of molecular and atomic species is evaluated as a function of discharge parameters to investigate their concentration. The emission intensity ratio I(N2+)/I(N$_{2}$) and I(N$^{+}$)/I(N) of the electronic transitions is also evaluated as a function of discharge parameters to investigate the relative dependence of their concentrations. It is observed that the concentration of the active species of N$_{2}$ plasma is strongly affected by the filling pressure and source power whereas flow rate has no significant effect. An increased occurrence of N2+ molecular ions in comparison with N$_{2}$ molecules, and N$^{+}$ ions in comparison with N atoms is observed with source power whereas decreased occurrence of N2+ molecular ions in comparison with N$_{2}$ molecules, and N$^{+}$ ions in comparison with N atoms is observed with the rise in filling pressure.
Starting Page	551
Ending Page	564
Page Count	14
File Format	PDF
ISSN	02724324
Journal	Plasma Chemistry and Plasma Processing
Volume Number	25
Issue Number	5
e-ISSN	15728986
Language	English
Publisher	Kluwer Academic Publishers-Plenum Publishers
Publisher Date	2005-01-01
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Emission intensity abnormal glow mode plasma surface nitriding Inorganic Chemistry Mechanics Nuclear Physics, Heavy Ions, Hadrons Mechanical Engineering Characterization and Evaluation Materials
Content Type	Text
Resource Type	Article
Subject	Chemistry Surfaces, Coatings and Films Condensed Matter Physics Chemical Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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