NDLI: Numerical Modeling of an Ar–H$_{2}$ Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions

Please wait, while we are loading the content...

Influence of the Excited States of Atomic Nitrogen N($^{2}$D), N($^{2}$P) and N(R) on the Transport Properties of Nitrogen. Part II: Nitrogen Plasma Properties

Plasma Chemistry and Plasma Processing : Volume 27, Issue 1, February 2007

Plasma Chemistry and Plasma Processing : Volume 26

Plasma Chemistry and Plasma Processing : Volume 25

Plasma Chemistry and Plasma Processing : Volume 24

Plasma Chemistry and Plasma Processing : Volume 23

Plasma Chemistry and Plasma Processing : Volume 22

Plasma Chemistry and Plasma Processing : Volume 21

Plasma Chemistry and Plasma Processing : Volume 20

Plasma Chemistry and Plasma Processing : Volume 19

Plasma Chemistry and Plasma Processing : Volume 18

Plasma Chemistry and Plasma Processing : Volume 17

Numerical Modeling of an Ar–H$_{2}$ Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions

Content Provider	Springer Nature Link
Author	Ye, Rubin Murphy, Anthony B. Ishigaki, Takamasa
Copyright Year	2007
Abstract	The species densities and the thermal and chemical nonequilibrium phenomena in an Ar–H$_{2}$ radio frequency inductively coupled plasma reactor used for hydrogenation of materials have been investigated through numerical simulation. The mathematical model consists of a two-temperature fluid dynamics model and a chemical kinetics model that takes into account the effect of local chemical nonequilibrium. Computations are carried out for the rf plasma running at 11.7 kW and 27 kPa for different Ar–H$_{2}$ mixtures and for pure argon. Predicted results for the electron and heavy-species temperatures, the species densities, as well as the degree of thermal and chemical nonequilibrium, are presented in detail. It is found that the electron and hydrogen atom densities in the reactor and in the near-wall region of the torch are strongly altered by nonequilibrium effects. The hydrogen atom density remains high in the reactor zone, and peaks in a region that has been found to be attractive for material processing. Deviations from thermal and chemical equilibrium are greatly reduced by the addition of hydrogen to an argon plasma.
Starting Page	189
Ending Page	204
Page Count	16
File Format	PDF
ISSN	02724324
Journal	Plasma Chemistry and Plasma Processing
Volume Number	27
Issue Number	2
e-ISSN	15728986
Language	English
Publisher	Kluwer Academic Publishers-Plenum Publishers
Publisher Date	2007-02-22
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	RF thermal plasmas Thermal nonequilibrium Chemical nonequilibrium chemical kinetics Species density Nuclear Physics, Heavy Ions, Hadrons Inorganic Chemistry Mechanical Engineering Characterization and Evaluation of Materials Mechanics
Content Type	Text
Resource Type	Article
Subject	Chemistry Surfaces, Coatings and Films Condensed Matter Physics Chemical Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Effects of Precursors and Plasma Parameters on Fullerene Synthesis in RF Thermal Plasma Reactor

Reduction of Metallurgical Wastes in an RF Thermal Plasma Reactor

In-Flight Spheroidization of Alumina Powders in Ar–H$_{2}$ and Ar–N$_{2}$ Induction Plasmas

Converting Methane by Using an RF Plasma Reactor

Two-Temperature Two-Dimensional Non Chemical Equilibrium Modeling of Ar–CO$_{2}$–H$_{2}$ Induction Thermal Plasmas at Atmospheric Pressure

Reaction Mechanisms in Both a CCl2F2/O2/Ar and a CCl2F2/H2/Ar RF Plasma Environment

Etching Characteristics and Mechanisms of TiO$_{2}$ Thin Films in HBr/Ar and Cl$_{2}$/Ar Inductively-Coupled Plasmas

Reactions of Nonequilibrium Oxygen Plasmas with Liquid Olefins

A Thermodynamic Analysis of Nonequilibrium Argon Plasma Torches

Numerical Modeling of an Ar–H$_{2}$ Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions

Similar Documents

Effects of Precursors and Plasma Parameters on Fullerene Synthesis in RF Thermal Plasma Reactor

Reduction of Metallurgical Wastes in an RF Thermal Plasma Reactor

In-Flight Spheroidization of Alumina Powders in Ar–H$_{2}$ and Ar–N$_{2}$ Induction Plasmas

Converting Methane by Using an RF Plasma Reactor

Two-Temperature Two-Dimensional Non Chemical Equilibrium Modeling of Ar–CO$_{2}$–H$_{2}$ Induction Thermal Plasmas at Atmospheric Pressure

Reaction Mechanisms in Both a CCl2F2/O2/Ar and a CCl2F2/H2/Ar RF Plasma Environment

Etching Characteristics and Mechanisms of TiO$_{2}$ Thin Films in HBr/Ar and Cl$_{2}$/Ar Inductively-Coupled Plasmas

Reactions of Nonequilibrium Oxygen Plasmas with Liquid Olefins

A Thermodynamic Analysis of Nonequilibrium Argon Plasma Torches

Numerical Modeling of an Ar–H$_{2}$ Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions