NDLI: Influence of the Plasma Chemistry on the Composition of ZrO$_{x}$ and NbO$_{x}$ Thin Films Deposited by Reactive Magnetron Sputtering

Content Provider	Springer Nature Link
Author	Mráz, Stanislav Schneider, Jochen M.
Copyright Year	2006
Abstract	The plasma chemistry of magnetron sputtered Zr and Nb in an Ar/O$_{2}$ atmosphere has been measured as a function of the O$_{2}$ partial pressure. The previously reported composition of films deposited onto grounded non-intentionally heated substrates was correlated with the dominant positive and negative ion populations in the plasma. While the oxygen deficient films were grown in the Ar$^{+}$ dominant mode, the close-to-stoichiometric films were grown in the O$^{+}$/O$^{−}$ dominant mode. The formation of close-to-stoichiometric ZrO$_{2.1}$ is observed in the compound mode (CM), while the formation of close-to-stoichiometric Nb$_{2}$O$_{4.7}$ thin films was reported in addition to the CM also in the transition mode (TM). This may be understood based on the 1.5–1.9 times higher power dissipated in the Nb–Ar–O$_{2}$ plasma as compared to the Zr–Ar–O$_{2}$ plasma. We suggest that at larger power O$_{2}$ dissociation may be more efficient and lead to the presence of sufficient atomic oxygen to fully oxidize the films. This finding may provide a pathway towards a deposition rate enhancement, since compound formation at the substrate is enabled in the TM of the higher power Nb–Ar–O$_{2}$ plasma and not only in the CM, as in the case of the lower power Zr–Ar–O$_{2}$ plasma.
Starting Page	197
Ending Page	203
Page Count	7
File Format	PDF
ISSN	02724324
Journal	Plasma Chemistry and Plasma Processing
Volume Number	26
Issue Number	2
e-ISSN	15728986
Language	English
Publisher	Springer US
Publisher Date	2006-04-07
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Zirconia Niobia Thin film composition Plasma chemistry Magnetron sputtering Nuclear Physics, Heavy Ions, Hadrons Inorganic Chemistry Mechanical Engineering Characterization and Evaluation of Materials Mechanics
Content Type	Text
Resource Type	Article
Subject	Chemistry Surfaces, Coatings and Films Condensed Matter Physics Chemical Engineering

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