NDLI: Plasma Processing and Polymers: A Personal Perspective

Content Provider	Springer Nature Link
Author	Wertheimer, Michael R.
Copyright Year	2013
Abstract	Low-temperature plasma science and technology has made enormous strides during the past half-century. To a significant extent, the driver has been integrated circuit (IC) processing, because without plasma-based etching and deposition techniques, the progression of Moore’s law would have ceased its course long ago. Scientific and technological advances no less spectacular than those in the IC sector, and of comparable economic impact, have occurred in the area of plasmas and polymers, where a third process type, surface modification, can be added to those, etching—or ablation, and deposition, mentioned above. In this article, we start by listing a number of particular features associated with the exposure of polymers to low-temperature plasmas, for example the liberation of volatile molecular fragments from the surface due to bond scissions, the accompanying creation of free radicals, cross-linking and grafting reactions induced by this and by vacuum-ultraviolet photon irradiation from excited species in the plasma, etc. All these aspects are of far lesser impact, if any at all, when the same plasmas are in contact with inorganic surfaces. We then list some high-volume industrial processes and operational details drawn from diverse economic sectors. These are accompanied by detailed example-cases from our own laboratories, based on both low- and atmospheric-pressure low-temperature plasma processes.
Starting Page	363
Ending Page	376
Page Count	14
File Format	PDF
ISSN	02724324
Journal	Plasma Chemistry and Plasma Processing
Volume Number	34
Issue Number	3
e-ISSN	15728986
Language	English
Publisher	Springer US
Publisher Date	2013-09-20
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Plasma processing Polymers Personal perspective Inorganic Chemistry Mechanics Characterization and Evaluation of Materials Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Chemistry Surfaces, Coatings and Films Condensed Matter Physics Chemical Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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