NDLI: Decomposition Mechanism of Fluorinated Compounds in Water Plasmas Generated Under Atmospheric Pressure

Content Provider	Springer Nature Link
Author	Saito, Hirori Watanabe, Takayuki
Copyright Year	2010
Abstract	Decomposition mechanism of HFC-134a, HFC-32, and CF$_{4}$ in water plasmas at atmospheric pressure has been investigated. The decomposition efficiency of 99.9% can be obtained up to 3.17 mol kWh$^{−1}$ of the ratio of hydrofluorocarbon (HFC) feed rate to the arc power and 1.89 mol kWh$^{−1}$ of the ratio of perfluorocarbon (PFC) feed rate to the arc power. The species such as H$_{2}$, CO, CO$_{2}$, CH$_{4}$, and CF$_{4}$ were detected from the effluent gas of both PFC and HFC decomposition. However, CH$_{2}$F$_{2}$ and CHF$_{3}$ were observed only in the case of HFC decomposition. The HFC and PFC decomposition generate CH$_{2}$F, CHF$_{x (x:1–2)}$, and CF$_{y (y:1–3)}$ radicals, then those radicals were subsequently oxidized by oxygen, leading to CO and CO$_{2}$ generation in the excess oxygen condition. However, when there is insufficient oxygen available, those radicals were easily recombined with fluorine to form by-product such as CH$_{2}$F$_{2}$, CHF$_{3}$, and CF$_{4}$.
Starting Page	813
Ending Page	829
Page Count	17
File Format	PDF
ISSN	02724324
Journal	Plasma Chemistry and Plasma Processing
Volume Number	30
Issue Number	6
e-ISSN	15728986
Language	English
Publisher	Springer US
Publisher Date	2010-10-24
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Hydrofluorocarbons Perfluorocarbons Water plasmas Thermal plasmas Nuclear Physics, Heavy Ions, Hadrons Inorganic Chemistry Mechanical Engineering Characterization and Evaluation of Materials Mechanics
Content Type	Text
Resource Type	Article
Subject	Chemistry Surfaces, Coatings and Films Condensed Matter Physics Chemical Engineering

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