NDLI: Effect of the orientation of the fixed analyzer on the ellipsometric parameters in rotating polarizer and compensator ellipsometer with speed ratio 1:1

Content Provider	Springer Nature Link
Author	Alkao, Anas A. Taya, Sofyan A. El Agez, Taher M.
Copyright Year	2014
Abstract	In a recent work, rotating polarizer compensator ellipsometer (RPCE) with a fixed analyzer was proposed. Three different ellipsometric configurations were presented by considering different speed ratios of the rotating elements. It was shown the speed ratio 1:1 corresponds the minimum error in the calculated optical parameters of c-Si and GaAs samples. In this paper, we investigate the effect of the fixed analyzer alignment on the ellipsometric parameters $$\psi $$ and $$\Delta $$ in RPCE structure with speed ratio 1:1 to find out the optimal angle at which the analyzer must be oriented to minimize the uncertainty in the calculated ellipsometric parameters. The uncertainties in the two ellipsometric parameters due to the uncertainties in Fourier coefficients are studied in details and it is found that an analyzer angle in the range $$40^{\circ }$$ – $$50^{\circ }$$ corresponds to the minimum uncertainty in $$\psi $$ and $$\Delta $$ and therefore this range is recommended.
Starting Page	2039
Ending Page	2053
Page Count	15
File Format	PDF
ISSN	03068919
Journal	Optical and Quantum Electronics
Volume Number	47
Issue Number	7
e-ISSN	1572817X
Language	English
Publisher	Springer US
Publisher Date	2014-11-21
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Ellipsometry Polarizer Analyzer Compensator Optics, Optoelectronics, Plasmonics and Optical Devices Electrical Engineering Characterization and Evaluation of Materials Computer Communication Networks
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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