NDLI: A double microbeam MEMS ohmic switch for RF-applications with low actuation voltage

Content Provider	Springer Nature Link
Author	Samaali, Hatem Najar, Fehmi Choura, Slim Nayfeh, Ali H. Masmoudi, Mohamed
Copyright Year	2010
Abstract	In this paper, we propose the design of an ohmic contact RF microswitch with low voltage actuation, where the upper and lower microplates are displaceable. We develop a mathematical model for the RF microswitch made up of two electrostatically actuated microplates; each microplate is attached to the end of a microcantilever. We assume that the microbeams are flexible and that the microplates are rigid. The electrostatic force applied between the two microplates is a nonlinear function of the displacements and applied voltage. We formulate and solve the static and eigenvalue problems associated with the proposed microsystem. We also examine the dynamic behavior of the microswitch by calculating the limit-cycle solutions. We discretize the equations of motion by considering the first few dominant modes in the microsystem dynamics. We show that only two modes are sufficient to accurately simulate the response of the microsystem under DC and harmonic AC voltages. We demonstrate that the resulting static pull-in voltage and switching time are reduced by 30 and 45%, respectively, as compared to those of a single microbeam-microplate RF-microswitch. Finally, we investigate the global stability of the microswitch using different excitation conditions.
Starting Page	719
Ending Page	734
Page Count	16
File Format	PDF
ISSN	0924090X
Journal	Nonlinear Dynamics
Volume Number	63
Issue Number	4
e-ISSN	1573269X
Language	English
Publisher	Springer Netherlands
Publisher Date	2010-09-21
Publisher Place	Dordrecht
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	MEMS Microswitch Pull-in Pull-out Reduced-order model Automotive Engineering Mechanics Mechanical Engineering Vibration, Dynamical Systems, Control
Content Type	Text
Resource Type	Article
Subject	Ocean Engineering Applied Mathematics Control and Systems Engineering Mechanical Engineering Electrical and Electronic Engineering Aerospace Engineering

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