NDLI: Grazing incidence X-ray diffraction (GIRXD) study of the phase composition of SiC$_{ x }$Fe$_{ y }$ and SiC$_{ x }$N$_{ y }$Fe$

Content Provider	Springer Nature Link
Author	Pushkarev, R. V. Fainer, N. I. Maurya, K. K.
Copyright Year	2015
Abstract	Films of various composition are synthesized by chemical vapor deposition under low pressure using the thermal decomposition of the following initial gas mixtures: ferrocene Fe(C$_{5}$H$_{5}$)$_{2}$ and helium; ferrocene, tris(diethylamino)silane [(C$_{2}$H$_{5}$)$_{2}$N]$_{3}$SiH (TDEAS) and helium; ferrocene, 1,1,1,3,3,3-hexamethyldisilazane [(CH$_{3}$)$_{3}$Si]$_{2}$NH (HMDS), and helium. The chemical composition of the films obtained is analyzed by FTIR and Raman spectroscopies. The phase composition of the films is studied by grazing incidence X-ray diffraction (GIXRD). It is determined that the films grown from the gas mixtures of organiosilicon compounds (TDEAS or HMDS), ferrocene, and helium have the same chemical and phase composition (SiC$_{ x }$N$_{ y }$Fe$_{ z }$), while the films obtained from the mixture of ferrocene and helium have another composition (SiC$_{ x }$Fe$_{ y }$).
Starting Page	1176
Ending Page	1178
Page Count	3
File Format	PDF
ISSN	00224766
Journal	Journal of Structural Chemistry
Volume Number	56
Issue Number	6
e-ISSN	15738779
Language	English
Publisher	Pleiades Publishing
Publisher Date	2016-01-23
Publisher Place	Moscow
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	grazing incidence X-ray diffraction films with the compositions SiC$_{ x }$Fe$_{ y }$ and SiC$_{ x }$N$_{ y }$Fe$_{ z }$ ferrocene Inorganic Chemistry Physical Chemistry Atomic, Molecular, Optical and Plasma Physics Atomic/Molecular Structure and Spectra Solid State Physics
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Physical and Theoretical Chemistry Inorganic Chemistry

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