NDLI: Bi$_{1.5}$Zn$_{1.0}$Nb$_{1.5}$O$_{7}$ thin films deposited at low temperature and post-annealed for crystallization

Content Provider	Springer Nature Link
Author	Zhang, Xiaohua Ren, Wei Shi, Peng
Copyright Year	2012
Abstract	Near-stoichiometric Bi$_{1.5}$Zn$_{1.0}$Nb$_{1.5}$O$_{7}$ (BZN) thin films were prepared on Pt/TiO$_{2}$/SiO$_{2}$/Si (100) substrates at 400 °C under an oxygen pressure of 10 Pa by using pulsed laser deposition process. The as-deposited BZN thin films were post-annealed at 700 °C for 30 min in situ vacuum chamber (in situ) and in oxygen ambient oven (ex situ). The crystallinity, microstructure and electrical properties of BZN thin films were investigated. The X-ray diffractometer results indicate that BZN thin films deposited at 400 °C are amorphous in nature and the post-annealed thin films exhibit a cubic pyrochlore structure. The as-deposited BZN thin films show permittivity of 68 and loss tangent of 0.0011 at 10 kHz, respectively. After a post-annealing at 700 °C for 30 min, the dielectric properties of thin films are significantly improved. Permittivity and loss tangent of the in situ annealed films are 127 and 0.005 at 10 kHz, respectively. And the films post-annealed in O$_{2}$ oven show the largest permittivity of 170 and tangent of 0.006. The improved dielectric properties can attribute to the crystallization of thin films. BZN thin films deposited at low temperature and crystallized at high temperature show the dielectric tunability without an electric breakdown to the maximum measurement bias voltage. And BZN thin films also show the excellent leakage current properties.
Starting Page	1595
Ending Page	1600
Page Count	6
File Format	PDF
ISSN	09574522
Journal	Journal of Materials Science: Materials in Electronics
Volume Number	24
Issue Number	5
e-ISSN	1573482X
Language	English
Publisher	Springer US
Publisher Date	2012-11-10
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Optical and Electronic Materials Characterization and Evaluation of Materials
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Biomaterials Biophysics Condensed Matter Physics Electronic, Optical and Magnetic Materials Bioengineering Electrical and Electronic Engineering Biomedical Engineering

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