NDLI: Effect of substrate temperature on structural, optical and electrical properties of ZnO thin films deposited by pulsed laser deposition

Content Provider	Springer Nature Link
Author	Kang, Seong Jun Joung, Yang Hee Shin, Hyun Ho Yoon, Yung Sup
Copyright Year	2007
Abstract	ZnO thin films were grown by the pulse laser deposition (PLD) method using Si (100) substrates at various substrate temperatures. The influence of the substrate temperature on the structural, optical, and electrical properties of the ZnO thin films was investigated. All of the thin films showed c-axis growth perpendicular to the substrate surface. At a substrate temperature of 500 °C, the ZnO thin film showed the highest (002) peak with a full width at half maximum (FWHM) of 0.39°. The X-ray Photoelectron Spectroscopy (XPS) study showed that Zn was in excess irrespective of the substrate temperature and that the thin film had a nearly stoichiometrical composition at a substrate temperature of 500 °C. The photoluminescence (PL) investigation showed that the narrowest UV FWHM of 15.8 nm and the largest ratio of the UV peak to the deep-level peak of 32.9 were observed at 500 °C. Hall effect measurement systems provided information about the carrier concentration, mobility and resistivity. At a substrate temperature of 500 °C, the Hall mobility was the value of 37.4 cm$^{2}$/Vs with carrier concentration of 1.36 × 10$^{18}$ cm$^{−3 }$and resistivity of 2.08 × 10$^{−1}$ Ω cm.
Starting Page	1073
Ending Page	1078
Page Count	6
File Format	PDF
ISSN	09574522
Journal	Journal of Materials Science: Materials in Electronics
Volume Number	19
Issue Number	11
e-ISSN	1573482X
Language	English
Publisher	Springer US
Publisher Date	2007-11-22
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Characterization and Evaluation of Materials Optical and Electronic Materials
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Biomaterials Biophysics Condensed Matter Physics Electronic, Optical and Magnetic Materials Bioengineering Electrical and Electronic Engineering Biomedical Engineering

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