NDLI: Non-ideal current drop behavior in ultra-thin inorganic a-InGaZnO thin film transistors

Content Provider	Springer Nature Link
Author	Kang, Won Jun Kim, Kyung Su Ahn, Cheol Hyoun Cho, Sung Woon Kim, Da Eun Kim, Bora Cho, Hyung Koun Kim, Yunseok
Copyright Year	2017
Abstract	Recent research in flexible and imperceptible electronic devices has been dominated by the development of robust channel materials and adequate processes for thin-film transistors (TFTs) based on an inorganic amorphous oxide. Water-soluble sacrificial polyvinyl alcohol and parylene were employed for the fabrication of ultra-light amorphous In–Ga–Zn–O (a-IGZO) TFTs with a top-gate configuration. But, a higher negative gate bias stress (≥5 V) caused anomalous degradation in the on-current level and field-effect mobility with increasing stress time, which was attributed to the rough surface of the chemical vapor deposited parylene film. The current work adopts an ultraviolet ozone irradiation treatment for improving the surface roughness of the polymer films prior to the fabrication of oxide TFTs. A suppression of the on-current drop and typical TFTs transfer behavior were observed under light irradiation with a negative gate bias stress. The a-IGZO TFTs on the parylene surface treated for 20 min exhibited a device thickness of approximately 5 µm and good TFT performances with field-effect mobility, subthreshold swing, and on/off current ratio values of 13.9 cm$^{2}$/V s, 0.24 V/dec, and 7 × 10$^{8}$, respectively. This survey suggests that a polymer film with a smooth surface can play a beneficial role in fabricating flexible ultra-slim a-IGZO TFTs.
Starting Page	8231
Ending Page	8237
Page Count	7
File Format	PDF
ISSN	09574522
Journal	Journal of Materials Science: Materials in Electronics
Volume Number	28
Issue Number	11
e-ISSN	1573482X
Language	English
Publisher	Springer US
Publisher Date	2017-02-15
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Optical and Electronic Materials Characterization and Evaluation of Materials
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Biomaterials Biophysics Condensed Matter Physics Electronic, Optical and Magnetic Materials Bioengineering Electrical and Electronic Engineering Biomedical Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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