WebSite Logo
  • Content
  • Similar Resources
  • Metadata
  • Cite This
  • Log-in
  • Fullscreen
Log-in
Do not have an account? Register Now
Forgot your password? Account recovery
  1. Journal of Materials Science: Materials in Electronics
  2. Journal of Materials Science: Materials in Electronics : Volume 9
  3. Journal of Materials Science: Materials in Electronics : Volume 9, Issue 2, March 1998
  4. Metallization studies on Ti3SiC2-based contacts on 6H-SiC
Loading...

Please wait, while we are loading the content...

Journal of Materials Science: Materials in Electronics : Volume 28
Journal of Materials Science: Materials in Electronics : Volume 27
Journal of Materials Science: Materials in Electronics : Volume 26
Journal of Materials Science: Materials in Electronics : Volume 25
Journal of Materials Science: Materials in Electronics : Volume 24
Journal of Materials Science: Materials in Electronics : Volume 23
Journal of Materials Science: Materials in Electronics : Volume 22
Journal of Materials Science: Materials in Electronics : Volume 21
Journal of Materials Science: Materials in Electronics : Volume 20
Journal of Materials Science: Materials in Electronics : Volume 19
Journal of Materials Science: Materials in Electronics : Volume 18
Journal of Materials Science: Materials in Electronics : Volume 17
Journal of Materials Science: Materials in Electronics : Volume 16
Journal of Materials Science: Materials in Electronics : Volume 15
Journal of Materials Science: Materials in Electronics : Volume 14
Journal of Materials Science: Materials in Electronics : Volume 13
Journal of Materials Science: Materials in Electronics : Volume 12
Journal of Materials Science: Materials in Electronics : Volume 11
Journal of Materials Science: Materials in Electronics : Volume 10
Journal of Materials Science: Materials in Electronics : Volume 9
Journal of Materials Science: Materials in Electronics : Volume 9, Issue 6, December 1998
Journal of Materials Science: Materials in Electronics : Volume 9, Issue 5, October 1998
Journal of Materials Science: Materials in Electronics : Volume 9, Issue 4, August 1998
Journal of Materials Science: Materials in Electronics : Volume 9, Issue 3, June 1998
Journal of Materials Science: Materials in Electronics : Volume 9, Issue 2, March 1998
Investigation of the effect of rare earth doping on the electrical and photovoltaic properties of chromotrope 2R thin film devices
Superconducting properties of 1212 phase in (Tl, M) Sr2(Ca1-xCrx)Cu2O7 (M=Zr and Ce)
Metallization studies on Ti3SiC2-based contacts on 6H-SiC
Diffusion barriers in gold-metallized titanium-based contact structures on SiC
Thermal etching of GaAs (1 1 3) surfaces
Growth of GaSb-rich and InAs-rich GaInAsSb alloys on GaSb substrates by MOCVD
Adsorption of diborane and hydrogen selenide on porous alumina and silica
Study of surface topography and optical properties of Ge15Bi38Se47 films
Effects of grain size on pyroelectric and dielectric properties of Pb0.9La0.1TiO3 ceramics
Effect of MgO addition on the electrical transport properties of highly Sb-doped BaTiO3 ceramics
Effect of reactive ion etching and post-etching annealing on the electrical characteristics of indium-tin oxide/silicon junctions
Electrical properties of the SnO2-based varistor
Effect of CuO–BaO mixture content on the grain growth of BaTiO3
Initial permeability studies on A13+ and Cr3+ substituted Ni–Zn ferrites
Journal of Materials Science: Materials in Electronics : Volume 9, Issue 1, February 1998
Journal of Materials Science: Materials in Electronics : Volume 8

Similar Documents

...
Comparison of Ni/Ti and Ni ohmic contacts on n-type 6H–SiC

Article

...
Electrical characterization of deep levels in N and P 6H-SiC Schottky diodes

Article

...
Buffer effects on the mosaic structure of the HR-GaN grown on 6H-SiC substrate by MOCVD

Article

...
Growth of thickness-controlled epitaxial graphene on on-axis 6H-SiC (C-face) substrate in graphite enclosure

Article

...
Effects of AlN buffer on the physical properties of GaN films grown on 6H-SiC substrates

Article

...
Chemical mechanical polishing (CMP) of on-axis Si-face 6H-SiC wafer for obtaining atomically flat defect-free surface

Article

...
Disorder induced conductivity enhancement in SHI irradiated undoped and N-doped 6H-SiC single crystals

Article

...
Synthesis of graphene on Co/SiC structure

Article

...
Cu$_{3}$Ge Schottky contacts on n-GaN

Article

Metallization studies on Ti3SiC2-based contacts on 6H-SiC

Content Provider Springer Nature Link
Copyright Year 1998
Abstract In this study, three different metals (Au, Al, and Pd) were investigated as possible metallization layers on top of titanium based electrical contacts on 6H-SiC. Experiments involved thermal stressing of contact structures and its effect on electrical and morphological contact properties. Gold proved to be stable up to 300 °C with good electrical properties. At 600 °C the films disintegrate within a matter of hours. Aluminium films are stable at 600 °C but the electrical contact resistance increases with annealing time. Palladium films are electrically and chemically stable at 600 °C. © 1998 Chapman & Hall
Starting Page 103
Ending Page 107
Page Count 5
File Format PDF
ISSN 09574522
Journal Journal of Materials Science: Materials in Electronics
Volume Number 9
Issue Number 2
e-ISSN 1573482X
Language English
Publisher Kluwer Academic Publishers
Publisher Date 1998-01-01
Publisher Place Boston
Access Restriction One Nation One Subscription (ONOS)
Subject Keyword Optical and Electronic Materials Characterization and Evaluation Materials
Content Type Text
Resource Type Article
Subject Atomic and Molecular Physics, and Optics Biomaterials Biophysics Condensed Matter Physics Electronic, Optical and Magnetic Materials Bioengineering Electrical and Electronic Engineering Biomedical Engineering
  • About
  • Disclaimer
  • Feedback
  • Sponsor
  • Contact
  • Chat with Us
About National Digital Library of India (NDLI)
NDLI logo

National Digital Library of India (NDLI) is a virtual repository of learning resources which is not just a repository with search/browse facilities but provides a host of services for the learner community. It is sponsored and mentored by Ministry of Education, Government of India, through its National Mission on Education through Information and Communication Technology (NMEICT). Filtered and federated searching is employed to facilitate focused searching so that learners can find the right resource with least effort and in minimum time. NDLI provides user group-specific services such as Examination Preparatory for School and College students and job aspirants. Services for Researchers and general learners are also provided. NDLI is designed to hold content of any language and provides interface support for 10 most widely used Indian languages. It is built to provide support for all academic levels including researchers and life-long learners, all disciplines, all popular forms of access devices and differently-abled learners. It is designed to enable people to learn and prepare from best practices from all over the world and to facilitate researchers to perform inter-linked exploration from multiple sources. It is developed, operated and maintained from Indian Institute of Technology Kharagpur.

Learn more about this project from here.

Disclaimer

NDLI is a conglomeration of freely available or institutionally contributed or donated or publisher managed contents. Almost all these contents are hosted and accessed from respective sources. The responsibility for authenticity, relevance, completeness, accuracy, reliability and suitability of these contents rests with the respective organization and NDLI has no responsibility or liability for these. Every effort is made to keep the NDLI portal up and running smoothly unless there are some unavoidable technical issues.

Feedback

Sponsor

Ministry of Education, through its National Mission on Education through Information and Communication Technology (NMEICT), has sponsored and funded the National Digital Library of India (NDLI) project.

Contact National Digital Library of India
Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302
See location in the Map
03222 282435
Mail: support@ndl.gov.in
Sl. Authority Responsibilities Communication Details
1 Ministry of Education (GoI),
Department of Higher Education
Sanctioning Authority https://www.education.gov.in/ict-initiatives
2 Indian Institute of Technology Kharagpur Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project https://www.iitkgp.ac.in
3 National Digital Library of India Office, Indian Institute of Technology Kharagpur The administrative and infrastructural headquarters of the project Dr. B. Sutradhar  bsutra@ndl.gov.in
4 Project PI / Joint PI Principal Investigator and Joint Principal Investigators of the project Dr. B. Sutradhar  bsutra@ndl.gov.in
Prof. Saswat Chakrabarti  will be added soon
5 Website/Portal (Helpdesk) Queries regarding NDLI and its services support@ndl.gov.in
6 Contents and Copyright Issues Queries related to content curation and copyright issues content@ndl.gov.in
7 National Digital Library of India Club (NDLI Club) Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach clubsupport@ndl.gov.in
8 Digital Preservation Centre (DPC) Assistance with digitizing and archiving copyright-free printed books dpc@ndl.gov.in
9 IDR Setup or Support Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops idr@ndl.gov.in
I will try my best to help you...
Cite this Content
Loading...