NDLI: Optimal design of multilayered polysilicon films for prescribed curvature

Content Provider	Springer Nature Link
Author	Ni, A. Sherman, D. Ballarini, R. Kahn, H. Mi, B. Phillips, S. M. Heuer, A. H.
Copyright Year	2003
Abstract	LPCVD polysilicon films exhibit tensile or compressive residual stresses and stress gradients, depending on deposition temperature. The stresses, which are a result of an “intrinsic” growth eigenstrain, ε$^{g}$, produce undesired curvatures in released structures. A combined experimental/computational design procedure is presented for controlling the curvature of thin films comprised of tensile layers, deposited at 570°C, alternated with compressive layers deposited at 615°C. Experimental measurements are first used to calculate the through-the-thickness variation of ε$^{g}$ for both temperatures. This information is in turn incorporated into a mechanical model that predicts, for prescribed parameters that define the geometry, elastic moduli, and eigenstrain distribution, the stress distribution before release, and the curvature upon release, of multilayered films. Comparisons of predicted and measured average stress before release of a number of films, and of the curvature upon release of a circular micromirror device, provide a preliminary assessment of the semi-empirical model, which when combined with optimization algorithms can be used to develop recipes (thicknesses of the individual layers of a multiplayer device) that will achieve prescribed curvature according to given constraints.
Starting Page	4169
Ending Page	4173
Page Count	5
File Format	PDF
ISSN	00222461
Journal	Journal of Materials Science
Volume Number	38
Issue Number	20
e-ISSN	15734803
Language	English
Publisher	Kluwer Academic Publishers
Publisher Date	2003-01-01
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Polymer Sciences Industrial Chemistry/Chemical Engineering Characterization and Evaluation Materials Mechanics
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Mechanics of Materials Mechanical Engineering Polymers and Plastics

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