NDLI: Investigating the influence of fabrication process and crystal orientation on shear strength of silicon microcomponents

Content Provider	Springer Nature Link
Author	Chen, Quanfang Yao, Da Jeng Kim, Chang Jin Carman, G. P.
Copyright Year	2000
Abstract	A summary of the influence of microfabrication processes (wet and dry etching) and crystal orientation on the effective shear strength of microridges is addressed in this paper. Test results indicate that both crystal orientation and geometry plays an important role in determining the strength. The largest shear strengths obtained were for triangular and rectangular ridges fabricated with wet etching and deep RIE respectively. Both of these structures had similar crystal orientations. These strength values were approximately 3.5 times larger than the lowest strengths measured for wet etching structures. Using Chlorine RIE, we were able to demonstrate the influence of crystal orientation on strength, with microridges of {110} sidewall made on a (100) wafer the largest. For wet etching, we found that the strength was concentration dependent. For example, a 45% KOH fabricated structure produced strength values 65% higher than 30% KOH fabricated ones (note crystal orientation the same). This was attributed to a geometric effect, that is the 45% KOH solution had a “V” shaped bottom while the 30% KOH had a flat bottom. EDP and TMAH values had similar strengths to the 30% KOH solution (note similar crystal orientation). Therefore, microcomponent strength is strongly dependent upon fabrication process as well as crystal orientation.
Starting Page	5465
Ending Page	5474
Page Count	10
File Format	PDF
ISSN	00222461
Journal	Journal of Materials Science
Volume Number	35
Issue Number	21
e-ISSN	15734803
Language	English
Publisher	Kluwer Academic Publishers
Publisher Date	2000-01-01
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Polymer Sciences Industrial Chemistry/Chemical Engineering Characterization and Evaluation Materials Mechanics
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Mechanics of Materials Mechanical Engineering Polymers and Plastics

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Shear strength of ceramics

Fabrication and mechanical properties of silicon carbide–silicon nitride nanocomposites

Development of a rapid prototyping process chain for the production of ceramic microcomponents

The influence of crystal anisotropy on mechanical behaviour

Self-reinforced silicon nitride of controlled microstructural orientation

Shear-induced crystallization of polypropylene: Influence of molecular weight

Fiber orientation and rheological properties of short fiber-reinforced plastics at higher shear rates

Moisture effects and acoustic emission characterization on lap shear strength in ultrasonic welded carbon/nylon composites

Growth parameters on the defects formation in a grown silicon crystal

Investigating the influence of fabrication process and crystal orientation on shear strength of silicon microcomponents

Similar Documents

Shear strength of ceramics

Fabrication and mechanical properties of silicon carbide–silicon nitride nanocomposites

Development of a rapid prototyping process chain for the production of ceramic microcomponents

The influence of crystal anisotropy on mechanical behaviour

Self-reinforced silicon nitride of controlled microstructural orientation

Shear-induced crystallization of polypropylene: Influence of molecular weight

Fiber orientation and rheological properties of short fiber-reinforced plastics at higher shear rates

Moisture effects and acoustic emission characterization on lap shear strength in ultrasonic welded carbon/nylon composites

Growth parameters on the defects formation in a grown silicon crystal

Investigating the influence of fabrication process and crystal orientation on shear strength of silicon microcomponents