NDLI: Preparation of high yield multi-walled carbon nanotubes by microwave plasma chemical vapor deposition at low temperature

Content Provider	Springer Nature Link
Author	Chen, Mi Chen, Chieng Ming Chen, Chia Fu
Copyright Year	2002
Abstract	Vertically-aligned carbon nanotubes(CNTs) with multi-walled structure were successfully grown on a Fe-deposited Si substrate at low temperature below 330°C by using the microwave plasma chemical vapor deposition of methane and carbon dioxide gas mixture. This is apparently different from the conventional reaction in gas mixtures of hydrogen and methane, hydrogen and acetylene, and hydrogen and benzene ... etc. High quality carbon nanotubes were grown at lower temperature with CO$_{2}$ and CH$_{4}$ gas mixture than those used by the previous. After deposition, the microstructure morphology of carbon nanotubes was observed with scanning electron microscope and high-resolution transmission electron microscope. The characteristics of carbon nanotubes were analyzed by laser Raman spectroscopy. The results showed the variation of the flow rate ratio of CH$_{4}$/CO$_{2}$ from 28.5 sccm/30 sccm to 30/30 sccm and the DC bias voltage from −150 V to −200 V, at 300 W microwave power, 1.3–2.0 kPa range of total gas pressure, and substrate temperatures between 300°C and 350°C. Vertically aligned carbon nanotubes with the diameter of about 15 nm and multi-walled structure were illustrated by SEM and HRTEM. However, the highest yield of carbon nanotubes of about 50% was obtained at low temperature below 330°C by MPCVD for the CH$_{4}$/CO$_{2}$ gas mixture with properly controlled parameters.
Starting Page	3561
Ending Page	3567
Page Count	7
File Format	PDF
ISSN	00222461
Journal	Journal of Materials Science
Volume Number	37
Issue Number	17
e-ISSN	15734803
Language	English
Publisher	Kluwer Academic Publishers
Publisher Date	2002-01-01
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Polymer Sciences Materials Science Characterization and Evaluation Materials Mechanics Crystallography Continuum Mechanics and Mechanics of Materials
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Mechanics of Materials Mechanical Engineering Polymers and Plastics

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