NDLI: Comparison between the ferroelectric/electric properties of the PbZr$_{0.52}$Ti$_{0.48}$O$_{3}$ films grown on Si (100) and on STO (100) substrates

Content Provider	Springer Nature Link
Author	Chirila, Cristina Boni, Andra Georgia Pasuk, Iuliana Negrea, Raluca Trupina, Lucian Rhun, Gwenael Yin, Shi Vilquin, Bertrand Pintilie, Ioana Pintilie, Lucian
Copyright Year	2015
Abstract	Ferroelectric/electric properties of PbZr$_{0.52}$Ti$_{0.48}$O$_{3}$ (PZT) thin films grown by pulsed laser deposition (PLD) on two different substrates, Si (001) and SrTiO$_{3}$ (STO) (001), were comparatively analyzed. The structural characterization has revealed the epitaxial relationship between the grown layers and the two types of substrates, with larger density of structural defects for the films deposited on Si (001) with buffer STO layer. The ferroelectric/electric properties are also different, with lower remnant polarization (about half of the value obtained on STO substrate), higher dielectric constant (about two times larger), and lower leakage current (about two orders of magnitude lower) for the PZT films deposited on Si (001) compared to those deposited on (001) STO substrates. Nevertheless, the results show that the use of a STO buffer layer on Si can be a solution to obtain good quality PZT capacitor structures without using expensive single-crystal oxide substrates. In this way, applications based on PZT capacitors (e.g. non-volatile memories, pyroelectric detectors, light switches, etc.) would be more easily integrated directly on Si wafers.
Starting Page	3883
Ending Page	3894
Page Count	12
File Format	PDF
ISSN	00222461
Journal	Journal of Materials Science
Volume Number	50
Issue Number	11
e-ISSN	15734803
Language	English
Publisher	Springer US
Publisher Date	2015-03-14
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Materials Science Characterization and Evaluation of Materials Polymer Sciences Continuum Mechanics and Mechanics of Materials Crystallography Mechanics
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Mechanics of Materials Mechanical Engineering Polymers and Plastics

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