NDLI: Patterning SiC nanoprecipitate in Si single crystals by simultaneous dual- beam ion implantation

Content Provider	Springer Nature Link
Author	Velişa, Gihan Trocellier, Patrick Thomé, Lionel Vaubaillon, Sylvain Sattonnay, Gaël Miro, Sandrine Serruys, Yves
Copyright Year	2014
Abstract	β–SiC nanoprecipitates can be patterned in crystalline silicon with an almost monomodal size distribution by simultaneous-dual-beam of C$^{+}$ and Si$^{+}$ ion implantations at 550 °C. Their shape appears as spherical (average diameter ~4–5 nm) ,and they are in epitaxial relationship with the crystalline silicon matrix. The narrow size distribution follows the left wing of the carbon distribution where the nuclear ion stopping, and thus the point defect generation rate is largest. This observation allows us to conclude that the induced damage act as sinks for C atoms leading to the SiC nanoprecipitates formation centered at the maximum of the simulated damage distribution. The nuclear reaction analysis, X-ray diffraction, Raman spectroscopy, and transmission electron microscopy techniques were used to characterize the samples.
Starting Page	4899
Ending Page	4904
Page Count	6
File Format	PDF
ISSN	00222461
Journal	Journal of Materials Science
Volume Number	49
Issue Number	14
e-ISSN	15734803
Language	English
Publisher	Springer US
Publisher Date	2014-04-01
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Materials Science Characterization and Evaluation of Materials Polymer Sciences Continuum Mechanics and Mechanics of Materials Crystallography Mechanics
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Mechanics of Materials Mechanical Engineering Polymers and Plastics

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Influence of ion energy on damage induced by Au-ion implantation in silicon carbide single crystals

SiC/SiC and SiC/Kovar joining by Ni–Si and Mo interlayers

Mechanism of synthesizing dense Si–SiC matrix C/C composites

Methods for the reduction of the micropipe density in SiC single crystals

Microstructure and mechanical properties of SiC$_{P}$/SiC and SiC$_{W}$/SiC composites by CVI

Effects of single- and simultaneous triple-ion-beam irradiation on an oxide dispersion-strengthened Fe12Cr steel

Conduction mechanisms in Si-LiNbO$_{3}$ heterostructures grown by ion-beam sputtering method

Deep electronic states in ion-implanted Si

Studies on machinability of Al/Si$_{p}$ + SiC$_{p}$ composite materials

Patterning SiC nanoprecipitate in Si single crystals by simultaneous dual- beam ion implantation

Similar Documents

Influence of ion energy on damage induced by Au-ion implantation in silicon carbide single crystals

SiC/SiC and SiC/Kovar joining by Ni–Si and Mo interlayers

Mechanism of synthesizing dense Si–SiC matrix C/C composites

Methods for the reduction of the micropipe density in SiC single crystals

Microstructure and mechanical properties of SiC$_{P}$/SiC and SiC$_{W}$/SiC composites by CVI

Effects of single- and simultaneous triple-ion-beam irradiation on an oxide dispersion-strengthened Fe12Cr steel

Conduction mechanisms in Si-LiNbO$_{3}$ heterostructures grown by ion-beam sputtering method

Deep electronic states in ion-implanted Si

Studies on machinability of Al/Si$_{p}$ + SiC$_{p}$ composite materials

Patterning SiC nanoprecipitate in Si single crystals by simultaneous dual- beam ion implantation