NDLI: Nanosecond pulsed excimer laser machining of chemically vapour-deposited diamond and graphite: Part II Analysis and modelling

Content Provider	Springer Nature Link
Author	Windholz, Richard Molian, P. A
Copyright Year	1998
Abstract	Analysis of the experimental data presented in Part I of this paper and those available in the literature revealed that the mechanism of material removal in laser machining of chemically vapour-deposited diamond is a two-step process: diamond transforms to graphite, and subsequently graphite sublimates. The energy fluence required for the formation of graphite is much lower than its removal by sublimation, and both are sensitive to the wavelength of the laser beam, the impurities present in the film and the environment during machining. When a 248 nm excimer laser beam interacts with diamond, there is an energy loss of 20% by reflection and 10% by transmission. The remaining 70% energy is used for heating the diamond, converting diamond to graphite, and sublimating graphite. Graphite is removed mostly by physical ablation and to some extent by chemical oxidation with the ambient.A theoretical calculation based on bond strength estimates that the threshold energy fluence for the ablation of diamond is 0.37 J cm-2. The experimental energy fluence was 0.8 J cm-2. Experimental results on the material removal rates as a function of energy fluence closely follow the Beer–Lambert equation, suggesting that physical ablation is the determining mechanism. Temperature calculations showed that both diamond and graphite tend to oxidize in a single laser pulse that contributes to the material removal.
Starting Page	523
Ending Page	528
Page Count	6
File Format	PDF
ISSN	00222461
Journal	Journal of Materials Science
Volume Number	33
Issue Number	2
e-ISSN	15734803
Language	English
Publisher	Kluwer Academic Publishers
Publisher Date	1998-01-01
Publisher Place	Dordrecht
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Polymer Sciences Industrial Chemistry/Chemical Engineering Characterization and Evaluation Materials Mechanics
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Mechanics of Materials Mechanical Engineering Polymers and Plastics

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