NDLI: Formation of a silicate layer between lead oxide and a silicon-wafer surface during heat treatment

Content Provider	Springer Nature Link
Author	LEE, WON GYU WOO, SEONG IHL
Copyright Year	1997
Abstract	PbO thin films were deposited on a silicon substrate by plasma-enhanced chemical vapour deposition (PECVD) using Pb(C$_{2}$H$_{5}$)$_{4}$ and oxygen at 250°C. The interdiffusion reaction phenomena between the PbO thin film and the silicon substrate during heat treatments were investigated in a horizontal furnace in the temperature range between 350 and 650°C under a nitrogen ambient for 1 h. The PECVD PbO film deposited on the silicon substrate at 250°C, was amorphous and contained carbon-related contaminants which could almost be removed by heat treatment at 350°C. The PbO on the silicon substrate initially participated in the interdiffusion reaction in the temperature range between 400 and 450°C. This produced a silicate layer containing lead components. The lead content in the film varied with the depth of film and heat-treatment temperature. Metallic lead was observed as a cluster in the specimen heated at 550°C. This cluster was produced by the agglomeration of metallic lead originating from PbO decomposition. The oxygen source for silicate formation was not ambient oxygen coming from the decomposition of Pb–O bonding. The metallic lead clusters dissolved as weakly bound metallic lead or as an unbound nanosized metal particle in the silicate layer at 650°C.
Starting Page	815
Ending Page	820
Page Count	6
File Format	PDF
ISSN	00222461
Journal	Journal of Materials Science
Volume Number	32
Issue Number	3
e-ISSN	15734803
Language	English
Publisher	Kluwer Academic Publishers-Plenum Publishers
Publisher Date	1997-01-01
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Polymer Sciences Materials Science Characterization and Evaluation Materials Mechanics Crystallography Continuum Mechanics and Mechanics of Materials
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Mechanics of Materials Mechanical Engineering Polymers and Plastics

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