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| Content Provider | Springer Nature Link |
|---|---|
| Author | Wu, Yong Jun Li, Juan Kuwabara, Makoto |
| Copyright Year | 2007 |
| Abstract | A new patterning method combining electron beam (EB) lithography and electrophoretic deposition (EPD) for fabricating micropatterned barium titanate (BaTiO$_{3}$) thin films was investigated. At first, resist molds with high resolution were prepared using EB lithography on Pt/Ti/Si substrates. Then BaTiO$_{3}$ nanoparticles were deposited on the substrates by EPD from a transparent suspension of monodispersed BaTiO$_{3}$ nanoparticles; a mixed solvent of 2-methoxyethonal and acetylacetone with a 9:1 volumetric ratio was used as a dispersion medium. The nanoparticles with an average size of about 10 nm were synthesized at a low temperature of 90 °C by a high concentration sol-gel process. EPD layers superfluously deposited on the resist molds were mechanically polished away, followed by chemically removing the molds in a resist remover to leave micropatterns of BaTiO$_{3}$ nanoparticles on the substrates, which were finally sintered to yield micropatterned BaTiO$_{3}$ ceramic thin films. The method developed may be used to fabricate other micropatterned electroceramic thin films. |
| Starting Page | 67 |
| Ending Page | 71 |
| Page Count | 5 |
| File Format | |
| ISSN | 13853449 |
| Journal | Journal of Electroceramics |
| Volume Number | 21 |
| Issue Number | 1-4 |
| e-ISSN | 15738663 |
| Language | English |
| Publisher | Springer US |
| Publisher Date | 2007-03-20 |
| Publisher Place | Boston |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | Barium titanate Micropatterning Thin film Electron beam lithography Electrophoretic deposition Sol-gel process Crystallography Electrochemistry Characterization and Evaluation of Materials Ceramics, Glass, Composites, Natural Methods Optical and Electronic Materials |
| Content Type | Text |
| Resource Type | Article |
| Subject | Ceramics and Composites Materials Chemistry Mechanics of Materials Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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