NDLI: Thick-film piezoceramics and devices

Content Provider	Springer Nature Link
Author	Torah, R. N. Beeby, S. P. Tudor, M. J. White, N. M.
Copyright Year	2007
Abstract	Over the past 20 years, thick-film (screen printed) technology has been shown to possess a variety of desirable characteristics, which are particularly suitable for the realisation of micro-sensors and actuators. In particular, thick-film sensors are noted for their robust, versatile, compact and inexpensive nature. This paper will describe how screen printed thick-films can be used as the basis for a variety of piezoelectric a transducers. It will be shown how the technology can be combined with MicroElectroMechanical Systems (MEMS) to generate new types of micro-engineered structure. The evolution of the technology to a successful enabling mechanism for modern-day solid state sensors is described. The paper begins with a brief overview of piezoelectric thick-films including a discussion of the main factors relating to paste formulation, characterisation and techniques for fabricating devices. There is also a description of methods for fabricating thick-films on silicon, which opens up the possibility of using thick-film technology in the field of MEMS. A number of specific sensors and actuators are described, including accelerometers, micropumps, ultrasonic motors, slip sensors for prosthetic hands, resonators, elastic wave sensors and ultrasonic separators.
Starting Page	97
Ending Page	112
Page Count	16
File Format	PDF
ISSN	13853449
Journal	Journal of Electroceramics
Volume Number	19
Issue Number	1
e-ISSN	15738663
Language	English
Publisher	Springer US
Publisher Date	2007-02-24
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	PZT Thick-film Screen-printing Crystallography Electrochemistry Characterization and Evaluation of Materials Ceramics, Glass, Composites, Natural Methods Optical and Electronic Materials
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Materials Chemistry Mechanics of Materials Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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