NDLI: Effect of mechanical loading on the tuning of acoustic resonances in Ba$_{x}$Sr$_{1−x }$TiO$

Content Provider	Springer Nature Link
Author	eth, A. Yamada, T. Tagantsev, A. K. Setter, N.
Copyright Year	2009
Abstract	The effect of mechanical loading on the tuning performance of a tunable Thin Film Bulk Acoustic Wave Resonator (TFBAR) based on a Ba$_{0.3}$Sr$_{0.7}$TiO$_{3}$ (BST) thin film has been investigated experimentally and theoretically. A membrane-type TFBAR was fabricated by means of micromachining. The mechanical load on the device was increased stepwise by evaporating SiO$_{2}$ on the backside of the membrane. The device was electrically characterized after each evaporation step and the results were compared to those obtained from modeling. The device with the smallest mechanical load exhibited a tuning of − 2.4% and − 0.6% for the resonance and antiresonance frequencies at a dc electric field of 615 kV/cm, respectively. With increasing mechanical load a decrease in the tuning performance was observed. This decrease was rather weak if the thickness of the mechanical load was smaller or comparable to the thickness of the active BST film. If the thickness of the mechanical load was larger than the thickness of the active BST layer, a significant reduction in the tuning performance was observed. The weaker tuning of the antiresonance frequency was due to a reduced tuning of the sound velocity of the BST layer with increasing dc bias. The resonance frequency showed a reduced tuning due to a decrease in the effective electromechanical coupling factor of the device with increasing mechanical load. With the help of the modeling we could de-embed the intrinsic tuning performance of a single, non-loaded BST thin film. We show that the tuning performance of the device with the smallest mechanical load we fabricated is close to the intrinsic tuning characteristics of the BST layer.
Starting Page	237
Ending Page	244
Page Count	8
File Format	PDF
ISSN	13853449
Journal	Journal of Electroceramics
Volume Number	24
Issue Number	3
e-ISSN	15738663
Language	English
Publisher	Springer US
Publisher Date	2009-01-28
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	BST Tunable BAW FBAR Crystallography Electrochemistry Characterization and Evaluation of Materials Ceramics, Glass, Composites, Natural Methods Optical and Electronic Materials
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Materials Chemistry Mechanics of Materials Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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