NDLI: Micropore formation in lead zirconate titanate films

Content Provider	Springer Nature Link
Author	Tentilova, I. Yu. Kaptelov, E. Yu. Pronin, I. P. Ugolkov, V. L.
Copyright Year	2012
Abstract	This paper presents an experimental study of the pyrochlore-to-perovskite phase transition in ferroelectric lead zirconate titanate (PZT) films grown on silicon substrates by rf magnetron sputtering and annealed in air or in an inert (argon) atmosphere at temperatures of up to 600°C and atmospheric pressure. Simultaneous thermal analysis results demonstrate that annealing in air leads to release of the latent heat of the phase transition, which is due to the conversion of lead oxide to lead orthoplumbate in the bulk of the PZT film. This transition is accompanied by changes in the densities of the perovskite phase and parent (pyrochlore) phase. In this case, the possibility of phase transformation should be ensured by changes in the volume of the system. The change in the volume of the film leads to the formation of micropores in the bulk of thin PZT films. The micropore size has been determined by scanning electron microscopy, and the phase composition of the films has been assessed by X-ray diffraction. We present experimental evidence that micropore nucleation and growth at the interface between the new and old phases in thin PZT films is due to the difference in density between these phases.
Starting Page	1136
Ending Page	1140
Page Count	5
File Format	PDF
ISSN	00201685
Journal	Inorganic Materials
Volume Number	48
Issue Number	11
e-ISSN	16083172
Language	English
Publisher	SP MAIK Nauka/Interperiodica
Publisher Date	2012-10-09
Publisher Place	Dordrecht
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Industrial Chemistry/Chemical Engineering Inorganic Chemistry Materials Science
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Metals and Alloys Chemical Engineering Inorganic Chemistry

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