NDLI: Quantitative Thermal Microscopy Measurement with Thermal Probe Driven by dc+ac Current

Content Provider	Springer Nature Link
Author	Bodzenta, Jerzy Juszczyk, Justyna Kaźmierczak Bałata, Anna Firek, Piotr Fleming, Austin Chirtoc, Mihai
Copyright Year	2016
Abstract	Quantitative thermal measurements with spatial resolution allowing the examination of objects of submicron dimensions are still a challenging task. The quantity of methods providing spatial resolution better than 100 nm is very limited. One of them is scanning thermal microscopy (SThM). This method is a variant of atomic force microscopy which uses a probe equipped with a temperature sensor near the apex. Depending on the sensor current, either the temperature or the thermal conductivity distribution at the sample surface can be measured. However, like all microscopy methods, the SThM gives only qualitative information. Quantitative measuring methods using SThM equipment are still under development. In this paper, a method based on simultaneous registration of the static and the dynamic electrical resistances of the probe driven by the sum of dc and ac currents, and examples of its applications are described. Special attention is paid to the investigation of thin films deposited on thick substrates. The influence of substrate thermal properties on the measured signal and its dependence on thin film thermal conductivity and film thickness are analyzed. It is shown that in the case where layer thicknesses are comparable or smaller than the probe–sample contact diameter, a correction procedure is required to obtain actual thermal conductivity of the layer. Experimental results obtained for thin SiO $$_{\mathrm {2}}$$ and BaTiO $$_{\mathrm {3 }}$$ layers with thicknesses in the range from 11 nm to 100 nm are correctly confirmed with this approach.
Starting Page	1
Ending Page	17
Page Count	17
File Format	PDF
ISSN	0195928X
Journal	International Journal of Thermophysics
Volume Number	37
Issue Number	7
e-ISSN	15729567
Language	English
Publisher	Springer US
Publisher Date	2016-05-31
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Finite element method Numerical analysis Scanning thermal microscopy Thermal conductivity measurement Thin layers Condensed Matter Physics Mechanics Industrial Chemistry/Chemical Engineering Physical Chemistry
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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