NDLI: Thermal and Electrical Conductivities of Porous Si Membranes

Content Provider	Springer Nature Link
Author	Hagi, Harutoshi Tanaka, Saburo Tanimura, Naoki Miyazaki, Koji
Copyright Year	2014
Abstract	The microstructure of materials affects thermal and electrical transport as well as the physical properties. The effects of the microstructure on both thermal and electrical transport in silicon membranes with periodic microporous structures produced from silicon-on-insulator wafers using microfabrication processes were studied. The in-plane thermal and electrical conductivities of the Si membranes were measured simultaneously by using a self-heating method. The measured thermal conductivity was compared with the result from the periodically laser-heating method. The thermal and electrical conductivities were much lower in the porous membranes than in the non-porous membrane. The measured thermal conductivity was much lower than expected based on values determined using classical models. A significant phonon size effect was observed even in microsized structures, and the mean free path for phonons was very long. It was concluded that phonon transport is quasi-ballistic and electron transport is diffuse in microporous Si structures. It was suggested that the microstructure had a different effect on thermal and electrical transport.
Starting Page	2548
Ending Page	2564
Page Count	17
File Format	PDF
ISSN	0195928X
Journal	International Journal of Thermophysics
Volume Number	36
Issue Number	10-11
e-ISSN	15729567
Language	English
Publisher	Springer US
Publisher Date	2014-06-28
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electrical conductivity Electrons MEMS Phonons Thermal conductivity Condensed Matter Physics Mechanics Industrial Chemistry/Chemical Engineering Physical Chemistry
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics

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