NDLI: Fabrication of a multiple-diameter branched network of microvascular channels with semi-circular cross-sections using xenon difluoride etching

Content Provider	Springer Nature Link
Author	Camp, James P. Stokol, Tracy Shuler, Michael L.
Copyright Year	2007
Abstract	The majority of microfluidic devices employ networks of channels that have rectangular cross-sections. At the microvascular scale of 30 to 300 μm in diameter, however, the distribution of fluid mechanical stresses and the induced shape of cultured cells will be quite different in a rectangular channel from the near-circular cross-sections seen in vivo. While round-cross-section channels have been produced before by wet etching, fine control of feature size has not been demonstrated, and prior work has only produced channels of a single diameter on a given device. In this work, the xenon difluoride process for isotropic etching of silicon was optimized for production of channels with semicircular cross-sections. This process was then used to produce a network of microvessel-scale semicylindrical channels on a silicon chip, the diameter of which was decreased with each level of branching. Additionally, it was demonstrated that endothelial cells will adhere to both the bottom and sides of these channels, indicating that such chips may be useful in the future for culturing in vitro models of the microvasculature.
Starting Page	179
Ending Page	186
Page Count	8
File Format	PDF
ISSN	13872176
Journal	Biomedical Microdevices
Volume Number	10
Issue Number	2
e-ISSN	15728781
Language	English
Publisher	Springer US
Publisher Date	2007-09-22
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Silicon Microfabrication Microvessel Rounded channels Circular cross-section Xenon difluoride Endothelial cells Engineering Fluid Dynamics Nanotechnology Biophysics/Biomedical Physics Biomedical Engineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Molecular Biology Biomedical Engineering

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